Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083392202> ?p ?o ?g. }
- W2083392202 endingPage "129" @default.
- W2083392202 startingPage "124" @default.
- W2083392202 abstract "Abstract This paper reports on the effects of Ar dilution on the structure, bonding and tribological properties of nitrogen-doped amorphous carbon films (a-C:H:N) deposited by r.f. glow discharge from CH 4 –N 2 and CH 4 –N 2 –Ar mixtures on silicon substrates. For different N 2 fractions, film structure and chemical composition were examined using Raman spectroscopy, X-ray reflectivity (XRR) and X-ray photoelectron spectroscopy (XPS). The mechanical and tribological properties were investigated by scratch testing and a tribometer in a ball-on-disk configuration. Results indicate that, as argon is introduced in the gas mixture, progressive graphitization of the films occurs and the mass density decreases. The behavior of the adhesive strength, as a function of nitrogen content, achieved with Ar addition is of the same order as those reported for CN x films. However, at a fixed nitrogen partial pressure, films obtained without Ar dilution show better adhesion and a denser sp 3 bonded carbon network." @default.
- W2083392202 created "2016-06-24" @default.
- W2083392202 creator A5011646505 @default.
- W2083392202 creator A5012295897 @default.
- W2083392202 creator A5034492787 @default.
- W2083392202 creator A5061049315 @default.
- W2083392202 creator A5063123925 @default.
- W2083392202 creator A5064200356 @default.
- W2083392202 creator A5077573453 @default.
- W2083392202 date "2001-11-01" @default.
- W2083392202 modified "2023-10-16" @default.
- W2083392202 title "Structure and mechanical properties of argon assisted carbon nitride films" @default.
- W2083392202 cites W1622534972 @default.
- W2083392202 cites W1965045568 @default.
- W2083392202 cites W1965075414 @default.
- W2083392202 cites W1988761762 @default.
- W2083392202 cites W1990567102 @default.
- W2083392202 cites W1996632985 @default.
- W2083392202 cites W2014651953 @default.
- W2083392202 cites W2017850410 @default.
- W2083392202 cites W2020892426 @default.
- W2083392202 cites W2025659062 @default.
- W2083392202 cites W2029156225 @default.
- W2083392202 cites W2033592536 @default.
- W2083392202 cites W2041032864 @default.
- W2083392202 cites W2041301890 @default.
- W2083392202 cites W2049491280 @default.
- W2083392202 cites W2051399612 @default.
- W2083392202 cites W2055663912 @default.
- W2083392202 cites W2055808512 @default.
- W2083392202 cites W2074672014 @default.
- W2083392202 cites W2081317224 @default.
- W2083392202 cites W2083228798 @default.
- W2083392202 cites W2091543628 @default.
- W2083392202 doi "https://doi.org/10.1016/s0040-6090(01)01458-4" @default.
- W2083392202 hasPublicationYear "2001" @default.
- W2083392202 type Work @default.
- W2083392202 sameAs 2083392202 @default.
- W2083392202 citedByCount "11" @default.
- W2083392202 countsByYear W20833922022013 @default.
- W2083392202 countsByYear W20833922022014 @default.
- W2083392202 crossrefType "journal-article" @default.
- W2083392202 hasAuthorship W2083392202A5011646505 @default.
- W2083392202 hasAuthorship W2083392202A5012295897 @default.
- W2083392202 hasAuthorship W2083392202A5034492787 @default.
- W2083392202 hasAuthorship W2083392202A5061049315 @default.
- W2083392202 hasAuthorship W2083392202A5063123925 @default.
- W2083392202 hasAuthorship W2083392202A5064200356 @default.
- W2083392202 hasAuthorship W2083392202A5077573453 @default.
- W2083392202 hasConcept C104779481 @default.
- W2083392202 hasConcept C127413603 @default.
- W2083392202 hasConcept C140205800 @default.
- W2083392202 hasConcept C159985019 @default.
- W2083392202 hasConcept C161790260 @default.
- W2083392202 hasConcept C171250308 @default.
- W2083392202 hasConcept C178790620 @default.
- W2083392202 hasConcept C185592680 @default.
- W2083392202 hasConcept C19067145 @default.
- W2083392202 hasConcept C192562407 @default.
- W2083392202 hasConcept C194760766 @default.
- W2083392202 hasConcept C2777492770 @default.
- W2083392202 hasConcept C2779227376 @default.
- W2083392202 hasConcept C42360764 @default.
- W2083392202 hasConcept C547737533 @default.
- W2083392202 hasConcept C65165184 @default.
- W2083392202 hasConcept C75937256 @default.
- W2083392202 hasConceptScore W2083392202C104779481 @default.
- W2083392202 hasConceptScore W2083392202C127413603 @default.
- W2083392202 hasConceptScore W2083392202C140205800 @default.
- W2083392202 hasConceptScore W2083392202C159985019 @default.
- W2083392202 hasConceptScore W2083392202C161790260 @default.
- W2083392202 hasConceptScore W2083392202C171250308 @default.
- W2083392202 hasConceptScore W2083392202C178790620 @default.
- W2083392202 hasConceptScore W2083392202C185592680 @default.
- W2083392202 hasConceptScore W2083392202C19067145 @default.
- W2083392202 hasConceptScore W2083392202C192562407 @default.
- W2083392202 hasConceptScore W2083392202C194760766 @default.
- W2083392202 hasConceptScore W2083392202C2777492770 @default.
- W2083392202 hasConceptScore W2083392202C2779227376 @default.
- W2083392202 hasConceptScore W2083392202C42360764 @default.
- W2083392202 hasConceptScore W2083392202C547737533 @default.
- W2083392202 hasConceptScore W2083392202C65165184 @default.
- W2083392202 hasConceptScore W2083392202C75937256 @default.
- W2083392202 hasLocation W20833922021 @default.
- W2083392202 hasOpenAccess W2083392202 @default.
- W2083392202 hasPrimaryLocation W20833922021 @default.
- W2083392202 hasRelatedWork W1509705615 @default.
- W2083392202 hasRelatedWork W1976427698 @default.
- W2083392202 hasRelatedWork W2002482061 @default.
- W2083392202 hasRelatedWork W2012904876 @default.
- W2083392202 hasRelatedWork W2042887735 @default.
- W2083392202 hasRelatedWork W2069240814 @default.
- W2083392202 hasRelatedWork W2083189760 @default.
- W2083392202 hasRelatedWork W2281404491 @default.
- W2083392202 hasRelatedWork W2971530704 @default.
- W2083392202 hasRelatedWork W4320804844 @default.
- W2083392202 hasVolume "398-399" @default.
- W2083392202 isParatext "false" @default.