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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083395228> ?p ?o ?g. }

• W2083395228 endingPage "5288" @default.
• W2083395228 startingPage "5286" @default.
• W2083395228 abstract "We demonstrate that the process of local oxidation of surfaces by atomic force microscopy (AFM) can be upscaled in a straightforward way by using a solid support with multiple protrusions as the cathode electrode. A metallized digital video disk DVD polymeric support has been used as a stamp to generate an array of features of variable length and 100 nm in width on a silicon surface covering a 5×6 mm2 region. The parallel patterning process involves the formation of as many liquid bridges as there are protrusions in the stamp. The growth rate of the parallel local oxides is slightly smaller than the one obtained by AFM experiments. Nonetheless, results from AFM local oxidation experiments can be readily extended to parallel oxidation which in turn opens the possibility of patterning centimeter-square regions with 10 nm motives." @default.
• W2083395228 created "2016-06-24" @default.
• W2083395228 creator A5009348664 @default.
• W2083395228 creator A5018866764 @default.
• W2083395228 creator A5036727505 @default.
• W2083395228 creator A5083307923 @default.
• W2083395228 date "2003-12-22" @default.
• W2083395228 modified "2023-10-16" @default.
• W2083395228 title "Parallel writing by local oxidation nanolithography with submicrometer resolution" @default.
• W2083395228 cites W1598456583 @default.
• W2083395228 cites W1989433021 @default.
• W2083395228 cites W1991048406 @default.
• W2083395228 cites W1995883235 @default.
• W2083395228 cites W1998918283 @default.
• W2083395228 cites W1999857680 @default.
• W2083395228 cites W2004841633 @default.
• W2083395228 cites W2005522660 @default.
• W2083395228 cites W2025279465 @default.
• W2083395228 cites W2049596300 @default.
• W2083395228 cites W2058323408 @default.
• W2083395228 cites W2062116385 @default.
• W2083395228 cites W2066908181 @default.
• W2083395228 cites W2071429174 @default.
• W2083395228 cites W2073163586 @default.
• W2083395228 cites W2084341384 @default.
• W2083395228 cites W2084742543 @default.
• W2083395228 cites W2088959322 @default.
• W2083395228 cites W2090605106 @default.
• W2083395228 cites W2094288102 @default.
• W2083395228 cites W2117634253 @default.
• W2083395228 cites W3105447968 @default.
• W2083395228 doi "https://doi.org/10.1063/1.1633685" @default.
• W2083395228 hasPublicationYear "2003" @default.
• W2083395228 type Work @default.
• W2083395228 sameAs 2083395228 @default.
• W2083395228 citedByCount "72" @default.
• W2083395228 countsByYear W20833952282012 @default.
• W2083395228 countsByYear W20833952282013 @default.
• W2083395228 countsByYear W20833952282014 @default.
• W2083395228 countsByYear W20833952282016 @default.
• W2083395228 countsByYear W20833952282017 @default.
• W2083395228 countsByYear W20833952282018 @default.
• W2083395228 countsByYear W20833952282019 @default.
• W2083395228 countsByYear W20833952282020 @default.
• W2083395228 countsByYear W20833952282022 @default.
• W2083395228 countsByYear W20833952282023 @default.
• W2083395228 crossrefType "journal-article" @default.
• W2083395228 hasAuthorship W2083395228A5009348664 @default.
• W2083395228 hasAuthorship W2083395228A5018866764 @default.
• W2083395228 hasAuthorship W2083395228A5036727505 @default.
• W2083395228 hasAuthorship W2083395228A5083307923 @default.
• W2083395228 hasBestOaLocation W20833952282 @default.
• W2083395228 hasConcept C102951782 @default.
• W2083395228 hasConcept C111919701 @default.
• W2083395228 hasConcept C136525101 @default.
• W2083395228 hasConcept C142724271 @default.
• W2083395228 hasConcept C147789679 @default.
• W2083395228 hasConcept C162117346 @default.
• W2083395228 hasConcept C171250308 @default.
• W2083395228 hasConcept C17525397 @default.
• W2083395228 hasConcept C185592680 @default.
• W2083395228 hasConcept C192562407 @default.
• W2083395228 hasConcept C204787440 @default.
• W2083395228 hasConcept C41008148 @default.
• W2083395228 hasConcept C49040817 @default.
• W2083395228 hasConcept C49110097 @default.
• W2083395228 hasConcept C544956773 @default.
• W2083395228 hasConcept C71924100 @default.
• W2083395228 hasConcept C98045186 @default.
• W2083395228 hasConceptScore W2083395228C102951782 @default.
• W2083395228 hasConceptScore W2083395228C111919701 @default.
• W2083395228 hasConceptScore W2083395228C136525101 @default.
• W2083395228 hasConceptScore W2083395228C142724271 @default.
• W2083395228 hasConceptScore W2083395228C147789679 @default.
• W2083395228 hasConceptScore W2083395228C162117346 @default.
• W2083395228 hasConceptScore W2083395228C171250308 @default.
• W2083395228 hasConceptScore W2083395228C17525397 @default.
• W2083395228 hasConceptScore W2083395228C185592680 @default.
• W2083395228 hasConceptScore W2083395228C192562407 @default.
• W2083395228 hasConceptScore W2083395228C204787440 @default.
• W2083395228 hasConceptScore W2083395228C41008148 @default.
• W2083395228 hasConceptScore W2083395228C49040817 @default.
• W2083395228 hasConceptScore W2083395228C49110097 @default.
• W2083395228 hasConceptScore W2083395228C544956773 @default.
• W2083395228 hasConceptScore W2083395228C71924100 @default.
• W2083395228 hasConceptScore W2083395228C98045186 @default.
• W2083395228 hasIssue "25" @default.
• W2083395228 hasLocation W20833952281 @default.
• W2083395228 hasLocation W20833952282 @default.
• W2083395228 hasOpenAccess W2083395228 @default.
• W2083395228 hasPrimaryLocation W20833952281 @default.
• W2083395228 hasRelatedWork W1971084516 @default.
• W2083395228 hasRelatedWork W1984377271 @default.
• W2083395228 hasRelatedWork W1992563783 @default.
• W2083395228 hasRelatedWork W2017473628 @default.
• W2083395228 hasRelatedWork W2034371918 @default.
• W2083395228 hasRelatedWork W2322100430 @default.
• W2083395228 hasRelatedWork W2979969075 @default.

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