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- W2083460199 abstract "Purpose – To predict the influence of inherent microfabrication and operating environmental influences on the performance of capacitive type sensors and actuators so that one can tune the performance and carry out more realistic designs.Design/methodology/approach – When the sensors and actuators are micromachined or microfabricated, they are subjected to special problems that are characteristic to microdimensions. The important concerns are the influence of microfabrication process on the material properties and influence of operating environment on the system behavior. Hence, this paper proposed a way of quantifying and modeling the influence of inherent limitations of microfabrication and operating environment for the better design of micromachined capacitive type sensors and actuators. The methodology applies the modeling the variation of the elastic property of the system due to above influences through elastic stiffening and weakening concepts. The approach includes the application of boundary condi..." @default.
- W2083460199 created "2016-06-24" @default.
- W2083460199 creator A5002625012 @default.
- W2083460199 date "2006-01-01" @default.
- W2083460199 modified "2023-10-14" @default.
- W2083460199 title "Microfabrication influence on the behavior of capacitive type MEMS sensors and actuators" @default.
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- W2083460199 doi "https://doi.org/10.1108/02602280610640698" @default.
- W2083460199 hasPublicationYear "2006" @default.
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