FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083470980> ?p ?o ?g. }

• W2083470980 endingPage "591" @default.
• W2083470980 startingPage "587" @default.
• W2083470980 abstract "Laser-assisted diffusion of dopants is a promising way to realize selective emitter solar cells with a reduced number of technological steps. This paper discusses the simulation by finite element method of laser doping in order to optimise the fabrication process. A finite element method is used to solve the heat-transfer equation which describes the thermal effects and Fick's second law which describes the diffusion of dopants. The phosphosilicate glass (PSG) layer that is produced during the emitter formation on p-type silicon solar cells is used as the doping source during the laser-assisted diffusion process. The influence of laser parameters and material properties are studied. Modelling results are compared to SIMS measurements of the phosphorous doping profile. A structure is discussed in the perspective of a self-aligned process for selective emitter fabrication, where the PSG layer is present underneath the silicon nitride (SiNx) passivation layer." @default.
• W2083470980 created "2016-06-24" @default.
• W2083470980 creator A5012447968 @default.
• W2083470980 creator A5037060444 @default.
• W2083470980 creator A5041561707 @default.
• W2083470980 creator A5054880661 @default.
• W2083470980 creator A5064614978 @default.
• W2083470980 date "2011-01-01" @default.
• W2083470980 modified "2023-09-25" @default.
• W2083470980 title "Finite Element Simulation Of Laser-Induced Diffusion In Silicon" @default.
• W2083470980 cites W1997833623 @default.
• W2083470980 cites W2011820493 @default.
• W2083470980 cites W2084985387 @default.
• W2083470980 cites W2117465439 @default.
• W2083470980 doi "https://doi.org/10.1016/j.egypro.2011.06.187" @default.
• W2083470980 hasPublicationYear "2011" @default.
• W2083470980 type Work @default.
• W2083470980 sameAs 2083470980 @default.
• W2083470980 citedByCount "12" @default.
• W2083470980 countsByYear W20834709802012 @default.
• W2083470980 countsByYear W20834709802015 @default.
• W2083470980 countsByYear W20834709802017 @default.
• W2083470980 countsByYear W20834709802019 @default.
• W2083470980 countsByYear W20834709802020 @default.
• W2083470980 countsByYear W20834709802021 @default.
• W2083470980 countsByYear W20834709802023 @default.
• W2083470980 crossrefType "journal-article" @default.
• W2083470980 hasAuthorship W2083470980A5012447968 @default.
• W2083470980 hasAuthorship W2083470980A5037060444 @default.
• W2083470980 hasAuthorship W2083470980A5041561707 @default.
• W2083470980 hasAuthorship W2083470980A5054880661 @default.
• W2083470980 hasAuthorship W2083470980A5064614978 @default.
• W2083470980 hasBestOaLocation W20834709801 @default.
• W2083470980 hasConcept C120665830 @default.
• W2083470980 hasConcept C121332964 @default.
• W2083470980 hasConcept C135628077 @default.
• W2083470980 hasConcept C136525101 @default.
• W2083470980 hasConcept C142724271 @default.
• W2083470980 hasConcept C171250308 @default.
• W2083470980 hasConcept C191952053 @default.
• W2083470980 hasConcept C192562407 @default.
• W2083470980 hasConcept C204787440 @default.
• W2083470980 hasConcept C2777431650 @default.
• W2083470980 hasConcept C2779227376 @default.
• W2083470980 hasConcept C3017618536 @default.
• W2083470980 hasConcept C33574316 @default.
• W2083470980 hasConcept C41008148 @default.
• W2083470980 hasConcept C46918542 @default.
• W2083470980 hasConcept C49040817 @default.
• W2083470980 hasConcept C520434653 @default.
• W2083470980 hasConcept C544956773 @default.
• W2083470980 hasConcept C56739046 @default.
• W2083470980 hasConcept C57863236 @default.
• W2083470980 hasConcept C65177555 @default.
• W2083470980 hasConcept C68710425 @default.
• W2083470980 hasConcept C69357855 @default.
• W2083470980 hasConcept C71924100 @default.
• W2083470980 hasConcept C97355855 @default.
• W2083470980 hasConceptScore W2083470980C120665830 @default.
• W2083470980 hasConceptScore W2083470980C121332964 @default.
• W2083470980 hasConceptScore W2083470980C135628077 @default.
• W2083470980 hasConceptScore W2083470980C136525101 @default.
• W2083470980 hasConceptScore W2083470980C142724271 @default.
• W2083470980 hasConceptScore W2083470980C171250308 @default.
• W2083470980 hasConceptScore W2083470980C191952053 @default.
• W2083470980 hasConceptScore W2083470980C192562407 @default.
• W2083470980 hasConceptScore W2083470980C204787440 @default.
• W2083470980 hasConceptScore W2083470980C2777431650 @default.
• W2083470980 hasConceptScore W2083470980C2779227376 @default.
• W2083470980 hasConceptScore W2083470980C3017618536 @default.
• W2083470980 hasConceptScore W2083470980C33574316 @default.
• W2083470980 hasConceptScore W2083470980C41008148 @default.
• W2083470980 hasConceptScore W2083470980C46918542 @default.
• W2083470980 hasConceptScore W2083470980C49040817 @default.
• W2083470980 hasConceptScore W2083470980C520434653 @default.
• W2083470980 hasConceptScore W2083470980C544956773 @default.
• W2083470980 hasConceptScore W2083470980C56739046 @default.
• W2083470980 hasConceptScore W2083470980C57863236 @default.
• W2083470980 hasConceptScore W2083470980C65177555 @default.
• W2083470980 hasConceptScore W2083470980C68710425 @default.
• W2083470980 hasConceptScore W2083470980C69357855 @default.
• W2083470980 hasConceptScore W2083470980C71924100 @default.
• W2083470980 hasConceptScore W2083470980C97355855 @default.
• W2083470980 hasLocation W20834709801 @default.
• W2083470980 hasOpenAccess W2083470980 @default.
• W2083470980 hasPrimaryLocation W20834709801 @default.
• W2083470980 hasRelatedWork W1939359203 @default.
• W2083470980 hasRelatedWork W2000777969 @default.
• W2083470980 hasRelatedWork W2020892943 @default.
• W2083470980 hasRelatedWork W2023626289 @default.
• W2083470980 hasRelatedWork W2024808868 @default.
• W2083470980 hasRelatedWork W2080862533 @default.
• W2083470980 hasRelatedWork W2181095883 @default.
• W2083470980 hasRelatedWork W2350612985 @default.
• W2083470980 hasRelatedWork W2902622345 @default.
• W2083470980 hasRelatedWork W321269702 @default.
• W2083470980 hasVolume "8" @default.
• W2083470980 isParatext "false" @default.

• next