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- W2083526446 abstract "Abstract In this report, Ar–BCl 3 plasmas produced by a 2450 MHz microwave discharge at 700 Pa are investigated by means of optical emission spectroscopy (OES). The emission spectrum of such discharges with high dilution of BCl 3 in argon is very rich in atomic lines (Ar, Cl, B + , Si) and molecular bands (BCl, B 2 , BO). The recently identified (1) 1 Δ u →b 1 Δ g and (2) 3 Π g →A 3 Π u systems of B 2 are observed and two new transitions are attributed to this latter system. Weak BO bands corresponding to the A 2 Π→X 2 Σ + transition are also observed. The excitation channels leading to the formation of these species are analysed by using data obtained by OES. Electron attachment reactions involving BCl 3 are found to be important in the kinetics of the microwave discharge, whereas reactions arising from metastable argon energy transfer must be negligible. Spatial analysis of the microwave discharge by OES is also presented and processes leading to excited B 2 states are discussed. Etching reactions are important through the observation of both Si and BO excited states at the end of the discharge." @default.
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- W2083526446 date "1997-12-01" @default.
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- W2083526446 title "Diagnostic of Ar–BCl3 microwave discharges by optical emission spectroscopy" @default.
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- W2083526446 doi "https://doi.org/10.1016/s0257-8972(97)00326-5" @default.
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