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- W2083558071 abstract "We demonstrate that real-time in situ spectroscopic ellipsometry can be used to measure the height evolution of nanostructures during low energy ion sputtering of GaSb. A graded anisotropic effective medium approximation is used to extract the height from the optical measurements. Two different growth regimes have been observed, first exponential then followed by a linear regime. The linear regime is not expected from the traditional sputtering theories. The in situ results correspond well to ex situ atomic force microscopy measurements." @default.
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- W2083558071 date "2009-05-25" @default.
- W2083558071 modified "2023-10-18" @default.
- W2083558071 title "Real-time <i>in situ</i> spectroscopic ellipsometry of GaSb nanostructures during sputtering" @default.
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- W2083558071 doi "https://doi.org/10.1063/1.3133350" @default.
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