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- W2083565251 endingPage "2194" @default.
- W2083565251 startingPage "2190" @default.
- W2083565251 abstract "The electromigration (EM) lifetimes of top-TiN/Ti/Al-0.5%Cu/Ti-bottom and top-TiN/Ti/Al-0.5%Cu/Ti/TiN/Ti-bottom stacked structures were investigated using five-level Al-alloy interconnections with tungsten-filled vias. TiN/Ti/AlCu /Ti stacked structures had an EM lifetime ten times longer than TiN/Ti/AlCu/Ti/TiN/Ti ones. This longer EM lifetime is probably due to the small grain-boundary diffusivities for the bamboo microstructure. In the TiN/Ti/AlCu/Ti structure, a localized Al3Ti intermetallic compound layer was formed by the reaction between Al and Ti at the AlCu/Ti interface. On the other hand, in the TiN/Ti/AlCu/Ti/TiN/Ti structures, an almost uniform Al3Ti intermetallic compound layer was formed at the AlCu/Ti interface. In the initial nucleation process in Al, the Al grain growth increased on Ti/SiO2 compared with Ti/TiN/Ti/SiO2 according to atomic force microscopy observation. Using the optimum Ti thickness (10 nm) made it possible to form long-EM-lifetime multilevel interconnections without using many metal stacked structures." @default.
- W2083565251 created "2016-06-24" @default.
- W2083565251 creator A5030989669 @default.
- W2083565251 date "2001-11-01" @default.
- W2083565251 modified "2023-09-25" @default.
- W2083565251 title "Electromigration performance of AlCu/Ti and AlCu/Ti/TiN/Ti metallization" @default.
- W2083565251 cites W1966274305 @default.
- W2083565251 cites W1974602296 @default.
- W2083565251 cites W1985193578 @default.
- W2083565251 cites W1997326261 @default.
- W2083565251 cites W2021893015 @default.
- W2083565251 cites W2028584064 @default.
- W2083565251 cites W2040893700 @default.
- W2083565251 cites W2046109232 @default.
- W2083565251 cites W2062074169 @default.
- W2083565251 cites W2066141926 @default.
- W2083565251 cites W2075528456 @default.
- W2083565251 doi "https://doi.org/10.1116/1.1418400" @default.
- W2083565251 hasPublicationYear "2001" @default.
- W2083565251 type Work @default.
- W2083565251 sameAs 2083565251 @default.
- W2083565251 citedByCount "1" @default.
- W2083565251 countsByYear W20835652512022 @default.
- W2083565251 crossrefType "journal-article" @default.
- W2083565251 hasAuthorship W2083565251A5030989669 @default.
- W2083565251 hasConcept C178790620 @default.
- W2083565251 hasConcept C185592680 @default.
- W2083565251 hasConcept C191897082 @default.
- W2083565251 hasConcept C192562407 @default.
- W2083565251 hasConcept C193341735 @default.
- W2083565251 hasConcept C27501479 @default.
- W2083565251 hasConcept C2780026712 @default.
- W2083565251 hasConcept C47908070 @default.
- W2083565251 hasConcept C525849907 @default.
- W2083565251 hasConcept C542268612 @default.
- W2083565251 hasConcept C544153396 @default.
- W2083565251 hasConcept C61048295 @default.
- W2083565251 hasConcept C87976508 @default.
- W2083565251 hasConceptScore W2083565251C178790620 @default.
- W2083565251 hasConceptScore W2083565251C185592680 @default.
- W2083565251 hasConceptScore W2083565251C191897082 @default.
- W2083565251 hasConceptScore W2083565251C192562407 @default.
- W2083565251 hasConceptScore W2083565251C193341735 @default.
- W2083565251 hasConceptScore W2083565251C27501479 @default.
- W2083565251 hasConceptScore W2083565251C2780026712 @default.
- W2083565251 hasConceptScore W2083565251C47908070 @default.
- W2083565251 hasConceptScore W2083565251C525849907 @default.
- W2083565251 hasConceptScore W2083565251C542268612 @default.
- W2083565251 hasConceptScore W2083565251C544153396 @default.
- W2083565251 hasConceptScore W2083565251C61048295 @default.
- W2083565251 hasConceptScore W2083565251C87976508 @default.
- W2083565251 hasIssue "6" @default.
- W2083565251 hasLocation W20835652511 @default.
- W2083565251 hasOpenAccess W2083565251 @default.
- W2083565251 hasPrimaryLocation W20835652511 @default.
- W2083565251 hasRelatedWork W1999552040 @default.
- W2083565251 hasRelatedWork W2010733322 @default.
- W2083565251 hasRelatedWork W2050291672 @default.
- W2083565251 hasRelatedWork W2051226461 @default.
- W2083565251 hasRelatedWork W2089251307 @default.
- W2083565251 hasRelatedWork W2113780760 @default.
- W2083565251 hasRelatedWork W2123155170 @default.
- W2083565251 hasRelatedWork W2379855728 @default.
- W2083565251 hasRelatedWork W2766515653 @default.
- W2083565251 hasRelatedWork W4205648827 @default.
- W2083565251 hasVolume "19" @default.
- W2083565251 isParatext "false" @default.
- W2083565251 isRetracted "false" @default.
- W2083565251 magId "2083565251" @default.
- W2083565251 workType "article" @default.