Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083569140> ?p ?o ?g. }
- W2083569140 endingPage "102" @default.
- W2083569140 startingPage "97" @default.
- W2083569140 abstract "A detailed chemisorption mechanism is proposed for the atomic layer deposition (ALD) of aluminium oxide nano layers using trimethyl aluminum (TMA) and water as precursors. Six possible chemisorption mechanisms, complete ligand exchange, partial ligand exchange, simple dissociation, complete dissociation via ligand exchange, complete dissociation and association, are proposed and related parameters like ligand to metal ratio (L/M), concentrations of metal atoms and methyl groups adsorbed are calculated and compared against reported values. The maximum number of methyl groups that can get attached on the surface is calculated in a different way which yields a more realistic value of 6·25 per nm2 substrate area. The dependence of the number of metal atoms adsorbed on OH concentration is explained clearly. It is proposed that a combination of complete ligand exchange and complete dissociation is the most probable chemisorption mechanism taking place at various OH concentrations." @default.
- W2083569140 created "2016-06-24" @default.
- W2083569140 creator A5014841486 @default.
- W2083569140 creator A5029104973 @default.
- W2083569140 date "2010-04-01" @default.
- W2083569140 modified "2023-09-28" @default.
- W2083569140 title "On adsorption of aluminium and methyl groups on silica for TMA/H2O process in atomic layer deposition of aluminium oxide nano layers" @default.
- W2083569140 cites W1966553199 @default.
- W2083569140 cites W1972256365 @default.
- W2083569140 cites W1978866341 @default.
- W2083569140 cites W1979121079 @default.
- W2083569140 cites W1995191254 @default.
- W2083569140 cites W2000894043 @default.
- W2083569140 cites W2003645630 @default.
- W2083569140 cites W2019676283 @default.
- W2083569140 cites W2032681615 @default.
- W2083569140 cites W2039871495 @default.
- W2083569140 cites W2052726420 @default.
- W2083569140 cites W2069497154 @default.
- W2083569140 cites W2072613916 @default.
- W2083569140 cites W2075543070 @default.
- W2083569140 cites W2077117617 @default.
- W2083569140 cites W2078778604 @default.
- W2083569140 cites W2087858406 @default.
- W2083569140 cites W2089317954 @default.
- W2083569140 cites W2093343057 @default.
- W2083569140 cites W2095169422 @default.
- W2083569140 cites W2095183381 @default.
- W2083569140 cites W2097448833 @default.
- W2083569140 cites W2107741794 @default.
- W2083569140 cites W2121901919 @default.
- W2083569140 doi "https://doi.org/10.1007/s12034-010-0028-6" @default.
- W2083569140 hasPublicationYear "2010" @default.
- W2083569140 type Work @default.
- W2083569140 sameAs 2083569140 @default.
- W2083569140 citedByCount "8" @default.
- W2083569140 countsByYear W20835691402012 @default.
- W2083569140 countsByYear W20835691402014 @default.
- W2083569140 countsByYear W20835691402017 @default.
- W2083569140 countsByYear W20835691402018 @default.
- W2083569140 countsByYear W20835691402019 @default.
- W2083569140 countsByYear W20835691402023 @default.
- W2083569140 crossrefType "journal-article" @default.
- W2083569140 hasAuthorship W2083569140A5014841486 @default.
- W2083569140 hasAuthorship W2083569140A5029104973 @default.
- W2083569140 hasBestOaLocation W20835691402 @default.
- W2083569140 hasConcept C102931765 @default.
- W2083569140 hasConcept C113196181 @default.
- W2083569140 hasConcept C116569031 @default.
- W2083569140 hasConcept C147789679 @default.
- W2083569140 hasConcept C150394285 @default.
- W2083569140 hasConcept C161790260 @default.
- W2083569140 hasConcept C170493617 @default.
- W2083569140 hasConcept C171250308 @default.
- W2083569140 hasConcept C178790620 @default.
- W2083569140 hasConcept C179104552 @default.
- W2083569140 hasConcept C185592680 @default.
- W2083569140 hasConcept C191897082 @default.
- W2083569140 hasConcept C192562407 @default.
- W2083569140 hasConcept C2777047311 @default.
- W2083569140 hasConcept C2779227376 @default.
- W2083569140 hasConcept C2779851234 @default.
- W2083569140 hasConcept C2780907538 @default.
- W2083569140 hasConcept C33790079 @default.
- W2083569140 hasConcept C513153333 @default.
- W2083569140 hasConcept C544153396 @default.
- W2083569140 hasConcept C55493867 @default.
- W2083569140 hasConcept C69544855 @default.
- W2083569140 hasConceptScore W2083569140C102931765 @default.
- W2083569140 hasConceptScore W2083569140C113196181 @default.
- W2083569140 hasConceptScore W2083569140C116569031 @default.
- W2083569140 hasConceptScore W2083569140C147789679 @default.
- W2083569140 hasConceptScore W2083569140C150394285 @default.
- W2083569140 hasConceptScore W2083569140C161790260 @default.
- W2083569140 hasConceptScore W2083569140C170493617 @default.
- W2083569140 hasConceptScore W2083569140C171250308 @default.
- W2083569140 hasConceptScore W2083569140C178790620 @default.
- W2083569140 hasConceptScore W2083569140C179104552 @default.
- W2083569140 hasConceptScore W2083569140C185592680 @default.
- W2083569140 hasConceptScore W2083569140C191897082 @default.
- W2083569140 hasConceptScore W2083569140C192562407 @default.
- W2083569140 hasConceptScore W2083569140C2777047311 @default.
- W2083569140 hasConceptScore W2083569140C2779227376 @default.
- W2083569140 hasConceptScore W2083569140C2779851234 @default.
- W2083569140 hasConceptScore W2083569140C2780907538 @default.
- W2083569140 hasConceptScore W2083569140C33790079 @default.
- W2083569140 hasConceptScore W2083569140C513153333 @default.
- W2083569140 hasConceptScore W2083569140C544153396 @default.
- W2083569140 hasConceptScore W2083569140C55493867 @default.
- W2083569140 hasConceptScore W2083569140C69544855 @default.
- W2083569140 hasIssue "2" @default.
- W2083569140 hasLocation W20835691401 @default.
- W2083569140 hasLocation W20835691402 @default.
- W2083569140 hasOpenAccess W2083569140 @default.
- W2083569140 hasPrimaryLocation W20835691401 @default.
- W2083569140 hasRelatedWork W122655642 @default.
- W2083569140 hasRelatedWork W1529307121 @default.
- W2083569140 hasRelatedWork W1988501380 @default.