Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083709898> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2083709898 endingPage "1131" @default.
- W2083709898 startingPage "1129" @default.
- W2083709898 abstract "It is demonstrated using rapid thermal annealing that the electrical activation of Si+-implanted GaAs capped with a plasma-enhanced chemical vapor deposited (PECVD) silicon nitride (SixNy) layer requires longer annealing times compared to capless annealing. The SIMS profiles of 2H from the GaAs samples onto which SixNy caps were deposited using deuterated ammonia showed that deuterium atoms diffuse readily into the implanted region during PECVD. The improvement in the electrical activation of the capped samples with annealing time correlates directly with decreasing concentration of the 2H in the GaAs. It is postulated that the H atoms diffusing into GaAs during PECVD are trapped by the implantation-induced damage and the delay in electrical activation corresponds to the time required for the release of the trapped H." @default.
- W2083709898 created "2016-06-24" @default.
- W2083709898 creator A5007312185 @default.
- W2083709898 creator A5008927569 @default.
- W2083709898 creator A5023046309 @default.
- W2083709898 creator A5085831471 @default.
- W2083709898 date "1990-09-10" @default.
- W2083709898 modified "2023-09-25" @default.
- W2083709898 title "Annealing behavior of GaAs implanted with Si+and SiF+and rapid thermally annealed with plasma‐enhanced chemical vapor deposited silicon nitride cap" @default.
- W2083709898 cites W1589686892 @default.
- W2083709898 cites W2022073541 @default.
- W2083709898 cites W2026531889 @default.
- W2083709898 cites W2031178988 @default.
- W2083709898 cites W2055318448 @default.
- W2083709898 cites W2056784549 @default.
- W2083709898 cites W2081816676 @default.
- W2083709898 cites W2093574781 @default.
- W2083709898 cites W2095157733 @default.
- W2083709898 cites W4211145342 @default.
- W2083709898 doi "https://doi.org/10.1063/1.103512" @default.
- W2083709898 hasPublicationYear "1990" @default.
- W2083709898 type Work @default.
- W2083709898 sameAs 2083709898 @default.
- W2083709898 citedByCount "18" @default.
- W2083709898 countsByYear W20837098982012 @default.
- W2083709898 countsByYear W20837098982017 @default.
- W2083709898 crossrefType "journal-article" @default.
- W2083709898 hasAuthorship W2083709898A5007312185 @default.
- W2083709898 hasAuthorship W2083709898A5008927569 @default.
- W2083709898 hasAuthorship W2083709898A5023046309 @default.
- W2083709898 hasAuthorship W2083709898A5085831471 @default.
- W2083709898 hasConcept C113196181 @default.
- W2083709898 hasConcept C121332964 @default.
- W2083709898 hasConcept C145148216 @default.
- W2083709898 hasConcept C159985019 @default.
- W2083709898 hasConcept C171250308 @default.
- W2083709898 hasConcept C178790620 @default.
- W2083709898 hasConcept C184779094 @default.
- W2083709898 hasConcept C185592680 @default.
- W2083709898 hasConcept C192562407 @default.
- W2083709898 hasConcept C194760766 @default.
- W2083709898 hasConcept C2777431650 @default.
- W2083709898 hasConcept C2777855556 @default.
- W2083709898 hasConcept C2779227376 @default.
- W2083709898 hasConcept C38347018 @default.
- W2083709898 hasConcept C41823505 @default.
- W2083709898 hasConcept C43617362 @default.
- W2083709898 hasConcept C49040817 @default.
- W2083709898 hasConcept C544956773 @default.
- W2083709898 hasConcept C57410435 @default.
- W2083709898 hasConcept C58364064 @default.
- W2083709898 hasConcept C62520636 @default.
- W2083709898 hasConcept C82706917 @default.
- W2083709898 hasConceptScore W2083709898C113196181 @default.
- W2083709898 hasConceptScore W2083709898C121332964 @default.
- W2083709898 hasConceptScore W2083709898C145148216 @default.
- W2083709898 hasConceptScore W2083709898C159985019 @default.
- W2083709898 hasConceptScore W2083709898C171250308 @default.
- W2083709898 hasConceptScore W2083709898C178790620 @default.
- W2083709898 hasConceptScore W2083709898C184779094 @default.
- W2083709898 hasConceptScore W2083709898C185592680 @default.
- W2083709898 hasConceptScore W2083709898C192562407 @default.
- W2083709898 hasConceptScore W2083709898C194760766 @default.
- W2083709898 hasConceptScore W2083709898C2777431650 @default.
- W2083709898 hasConceptScore W2083709898C2777855556 @default.
- W2083709898 hasConceptScore W2083709898C2779227376 @default.
- W2083709898 hasConceptScore W2083709898C38347018 @default.
- W2083709898 hasConceptScore W2083709898C41823505 @default.
- W2083709898 hasConceptScore W2083709898C43617362 @default.
- W2083709898 hasConceptScore W2083709898C49040817 @default.
- W2083709898 hasConceptScore W2083709898C544956773 @default.
- W2083709898 hasConceptScore W2083709898C57410435 @default.
- W2083709898 hasConceptScore W2083709898C58364064 @default.
- W2083709898 hasConceptScore W2083709898C62520636 @default.
- W2083709898 hasConceptScore W2083709898C82706917 @default.
- W2083709898 hasIssue "11" @default.
- W2083709898 hasLocation W20837098981 @default.
- W2083709898 hasOpenAccess W2083709898 @default.
- W2083709898 hasPrimaryLocation W20837098981 @default.
- W2083709898 hasRelatedWork W1997428111 @default.
- W2083709898 hasRelatedWork W2031170839 @default.
- W2083709898 hasRelatedWork W2042925312 @default.
- W2083709898 hasRelatedWork W2048269824 @default.
- W2083709898 hasRelatedWork W2058979042 @default.
- W2083709898 hasRelatedWork W2065258228 @default.
- W2083709898 hasRelatedWork W2065669148 @default.
- W2083709898 hasRelatedWork W2082824188 @default.
- W2083709898 hasRelatedWork W2083709898 @default.
- W2083709898 hasRelatedWork W2275386326 @default.
- W2083709898 hasVolume "57" @default.
- W2083709898 isParatext "false" @default.
- W2083709898 isRetracted "false" @default.
- W2083709898 magId "2083709898" @default.
- W2083709898 workType "article" @default.