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- W2083782005 abstract "We propose an alternative method to control atomic step networks on silicon for future wafer-scale integration of self-assembling nanostructures. The method is the strain-distribution-control method that we have recently proposed in [H. Omi, D. J. Bottomley, and T. Ogino, Appl. Phys. Lett. 80, 1073 (2002)], which we apply here to design atomic step networks on vicinal Si(111) wafer. Si(111) with its strain patterned by buried silicon oxide inclusions was annealed at 1230 °C in ultrahigh vacuum and observed by in situ secondary electron microscopy and ex situ atomic force microscopy. The images show that the method enables us to create the desired arrays of atomic step networks on an arbitrary area of planar silicon wafer. The arrays remain stable during the 1230 °C annealing." @default.
- W2083782005 created "2016-06-24" @default.
- W2083782005 creator A5008899365 @default.
- W2083782005 creator A5056714217 @default.
- W2083782005 creator A5065832041 @default.
- W2083782005 creator A5084879846 @default.
- W2083782005 creator A5090256577 @default.
- W2083782005 date "2004-01-01" @default.
- W2083782005 modified "2023-09-24" @default.
- W2083782005 title "Design of atomic step networks on Si(111) through strain distribution control" @default.
- W2083782005 cites W1667610642 @default.
- W2083782005 cites W1972182821 @default.
- W2083782005 cites W1979054165 @default.
- W2083782005 cites W1979443058 @default.
- W2083782005 cites W2006875658 @default.
- W2083782005 cites W2013693386 @default.
- W2083782005 cites W2016064020 @default.
- W2083782005 cites W2026029671 @default.
- W2083782005 cites W2027515337 @default.
- W2083782005 cites W2032648180 @default.
- W2083782005 cites W2040458243 @default.
- W2083782005 cites W2045621474 @default.
- W2083782005 cites W2058577391 @default.
- W2083782005 cites W2060056175 @default.
- W2083782005 cites W2077404237 @default.
- W2083782005 cites W2082259578 @default.
- W2083782005 cites W2091975820 @default.
- W2083782005 doi "https://doi.org/10.1063/1.1630691" @default.
- W2083782005 hasPublicationYear "2004" @default.
- W2083782005 type Work @default.
- W2083782005 sameAs 2083782005 @default.
- W2083782005 citedByCount "2" @default.
- W2083782005 crossrefType "journal-article" @default.
- W2083782005 hasAuthorship W2083782005A5008899365 @default.
- W2083782005 hasAuthorship W2083782005A5056714217 @default.
- W2083782005 hasAuthorship W2083782005A5065832041 @default.
- W2083782005 hasAuthorship W2083782005A5084879846 @default.
- W2083782005 hasAuthorship W2083782005A5090256577 @default.
- W2083782005 hasConcept C102951782 @default.
- W2083782005 hasConcept C121332964 @default.
- W2083782005 hasConcept C121349320 @default.
- W2083782005 hasConcept C121684516 @default.
- W2083782005 hasConcept C134786449 @default.
- W2083782005 hasConcept C160671074 @default.
- W2083782005 hasConcept C171250308 @default.
- W2083782005 hasConcept C178790620 @default.
- W2083782005 hasConcept C185592680 @default.
- W2083782005 hasConcept C186187911 @default.
- W2083782005 hasConcept C191897082 @default.
- W2083782005 hasConcept C192562407 @default.
- W2083782005 hasConcept C26873012 @default.
- W2083782005 hasConcept C2777855556 @default.
- W2083782005 hasConcept C2779133538 @default.
- W2083782005 hasConcept C41008148 @default.
- W2083782005 hasConcept C49040817 @default.
- W2083782005 hasConcept C544956773 @default.
- W2083782005 hasConcept C62520636 @default.
- W2083782005 hasConcept C66823137 @default.
- W2083782005 hasConceptScore W2083782005C102951782 @default.
- W2083782005 hasConceptScore W2083782005C121332964 @default.
- W2083782005 hasConceptScore W2083782005C121349320 @default.
- W2083782005 hasConceptScore W2083782005C121684516 @default.
- W2083782005 hasConceptScore W2083782005C134786449 @default.
- W2083782005 hasConceptScore W2083782005C160671074 @default.
- W2083782005 hasConceptScore W2083782005C171250308 @default.
- W2083782005 hasConceptScore W2083782005C178790620 @default.
- W2083782005 hasConceptScore W2083782005C185592680 @default.
- W2083782005 hasConceptScore W2083782005C186187911 @default.
- W2083782005 hasConceptScore W2083782005C191897082 @default.
- W2083782005 hasConceptScore W2083782005C192562407 @default.
- W2083782005 hasConceptScore W2083782005C26873012 @default.
- W2083782005 hasConceptScore W2083782005C2777855556 @default.
- W2083782005 hasConceptScore W2083782005C2779133538 @default.
- W2083782005 hasConceptScore W2083782005C41008148 @default.
- W2083782005 hasConceptScore W2083782005C49040817 @default.
- W2083782005 hasConceptScore W2083782005C544956773 @default.
- W2083782005 hasConceptScore W2083782005C62520636 @default.
- W2083782005 hasConceptScore W2083782005C66823137 @default.
- W2083782005 hasLocation W20837820051 @default.
- W2083782005 hasOpenAccess W2083782005 @default.
- W2083782005 hasPrimaryLocation W20837820051 @default.
- W2083782005 hasRelatedWork W2328380595 @default.
- W2083782005 hasRelatedWork W2748952813 @default.
- W2083782005 hasRelatedWork W2767097158 @default.
- W2083782005 hasRelatedWork W2899084033 @default.
- W2083782005 hasRelatedWork W2899764894 @default.
- W2083782005 hasRelatedWork W3111794353 @default.
- W2083782005 hasRelatedWork W3130631319 @default.
- W2083782005 hasRelatedWork W3164078978 @default.
- W2083782005 hasRelatedWork W4238362059 @default.
- W2083782005 hasRelatedWork W4246450666 @default.
- W2083782005 isParatext "false" @default.
- W2083782005 isRetracted "false" @default.
- W2083782005 magId "2083782005" @default.
- W2083782005 workType "article" @default.