Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083872482> ?p ?o ?g. }
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- W2083872482 endingPage "238" @default.
- W2083872482 startingPage "235" @default.
- W2083872482 abstract "A set of three 4H-SiC wafers with manufacturer specified micropipe density of 0-5 cm-2 were characterized by x-ray diffraction (XRD) maps before and after final chemical-mechanical polish. After final polish, the wafers were also investigated with atomic force microscopy, radius of curvature measurements and cross-polarization (x-pol) mapping. It was found that there was largely a lack of correlation between the XRD and x-pol maps, which strongly suggests that x-pol is insensitive to crystalline imperfections to which XRD is sensitive." @default.
- W2083872482 created "2016-06-24" @default.
- W2083872482 creator A5012543701 @default.
- W2083872482 creator A5013786507 @default.
- W2083872482 creator A5027610617 @default.
- W2083872482 creator A5034564371 @default.
- W2083872482 creator A5043619375 @default.
- W2083872482 creator A5059022137 @default.
- W2083872482 creator A5075673017 @default.
- W2083872482 date "2007-09-01" @default.
- W2083872482 modified "2023-09-27" @default.
- W2083872482 title "Comparative Investigation between X-Ray Diffraction and Cross Polarization Mapping of 4H-SiC Wafers Off-Cut 4° Towards (11-20)" @default.
- W2083872482 cites W2019152286 @default.
- W2083872482 cites W2111159658 @default.
- W2083872482 doi "https://doi.org/10.4028/www.scientific.net/msf.556-557.235" @default.
- W2083872482 hasPublicationYear "2007" @default.
- W2083872482 type Work @default.
- W2083872482 sameAs 2083872482 @default.
- W2083872482 citedByCount "0" @default.
- W2083872482 crossrefType "journal-article" @default.
- W2083872482 hasAuthorship W2083872482A5012543701 @default.
- W2083872482 hasAuthorship W2083872482A5013786507 @default.
- W2083872482 hasAuthorship W2083872482A5027610617 @default.
- W2083872482 hasAuthorship W2083872482A5034564371 @default.
- W2083872482 hasAuthorship W2083872482A5043619375 @default.
- W2083872482 hasAuthorship W2083872482A5059022137 @default.
- W2083872482 hasAuthorship W2083872482A5075673017 @default.
- W2083872482 hasConcept C102951782 @default.
- W2083872482 hasConcept C113196181 @default.
- W2083872482 hasConcept C11665553 @default.
- W2083872482 hasConcept C120665830 @default.
- W2083872482 hasConcept C121332964 @default.
- W2083872482 hasConcept C127813850 @default.
- W2083872482 hasConcept C147789679 @default.
- W2083872482 hasConcept C160671074 @default.
- W2083872482 hasConcept C171250308 @default.
- W2083872482 hasConcept C175017881 @default.
- W2083872482 hasConcept C178635117 @default.
- W2083872482 hasConcept C185592680 @default.
- W2083872482 hasConcept C192562407 @default.
- W2083872482 hasConcept C195065555 @default.
- W2083872482 hasConcept C205049153 @default.
- W2083872482 hasConcept C207114421 @default.
- W2083872482 hasConcept C2524010 @default.
- W2083872482 hasConcept C2779328170 @default.
- W2083872482 hasConcept C33923547 @default.
- W2083872482 hasConcept C38652104 @default.
- W2083872482 hasConcept C41008148 @default.
- W2083872482 hasConcept C43617362 @default.
- W2083872482 hasConcept C49040817 @default.
- W2083872482 hasConcept C50515024 @default.
- W2083872482 hasConcept C8010536 @default.
- W2083872482 hasConceptScore W2083872482C102951782 @default.
- W2083872482 hasConceptScore W2083872482C113196181 @default.
- W2083872482 hasConceptScore W2083872482C11665553 @default.
- W2083872482 hasConceptScore W2083872482C120665830 @default.
- W2083872482 hasConceptScore W2083872482C121332964 @default.
- W2083872482 hasConceptScore W2083872482C127813850 @default.
- W2083872482 hasConceptScore W2083872482C147789679 @default.
- W2083872482 hasConceptScore W2083872482C160671074 @default.
- W2083872482 hasConceptScore W2083872482C171250308 @default.
- W2083872482 hasConceptScore W2083872482C175017881 @default.
- W2083872482 hasConceptScore W2083872482C178635117 @default.
- W2083872482 hasConceptScore W2083872482C185592680 @default.
- W2083872482 hasConceptScore W2083872482C192562407 @default.
- W2083872482 hasConceptScore W2083872482C195065555 @default.
- W2083872482 hasConceptScore W2083872482C205049153 @default.
- W2083872482 hasConceptScore W2083872482C207114421 @default.
- W2083872482 hasConceptScore W2083872482C2524010 @default.
- W2083872482 hasConceptScore W2083872482C2779328170 @default.
- W2083872482 hasConceptScore W2083872482C33923547 @default.
- W2083872482 hasConceptScore W2083872482C38652104 @default.
- W2083872482 hasConceptScore W2083872482C41008148 @default.
- W2083872482 hasConceptScore W2083872482C43617362 @default.
- W2083872482 hasConceptScore W2083872482C49040817 @default.
- W2083872482 hasConceptScore W2083872482C50515024 @default.
- W2083872482 hasConceptScore W2083872482C8010536 @default.
- W2083872482 hasLocation W20838724821 @default.
- W2083872482 hasOpenAccess W2083872482 @default.
- W2083872482 hasPrimaryLocation W20838724821 @default.
- W2083872482 hasRelatedWork W1001566253 @default.
- W2083872482 hasRelatedWork W1990430637 @default.
- W2083872482 hasRelatedWork W2009881871 @default.
- W2083872482 hasRelatedWork W2042360567 @default.
- W2083872482 hasRelatedWork W2067770212 @default.
- W2083872482 hasRelatedWork W2073593333 @default.
- W2083872482 hasRelatedWork W2114640305 @default.
- W2083872482 hasRelatedWork W2759105589 @default.
- W2083872482 hasRelatedWork W2904865010 @default.
- W2083872482 hasRelatedWork W3148879895 @default.
- W2083872482 hasVolume "556-557" @default.
- W2083872482 isParatext "false" @default.
- W2083872482 isRetracted "false" @default.
- W2083872482 magId "2083872482" @default.
- W2083872482 workType "article" @default.