Matches in SemOpenAlex for { <https://semopenalex.org/work/W2084048347> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2084048347 abstract "Photon induced haze resulting from sulfur residues that remain after cleaning and photoresist stripping is a key challenge for 193 nm photomasks. In previously reported work, sulfur-free processes for cleaning and photoresist removal on mask blanks were shown. Additional characterization and development of the cleaning and strip/clean processes are presented here. For cleaning the particle adder stability, ammonia chemistry residue levels, and chrome oxide anti-reflection coating (ARC) layer integrity were characterized. It was found that process modification was needed to provide acceptable post-clean ammonia levels and reflectivity change per clean. A strip/clean process with acceptable window for complete resist removal without ARC layer damage was found to be challenging and dependent on the mask photoresist/ARC stack. Dry strip, wet strip, and combined dry/wet stripping approaches (all followed by wet clean) were investigated. Oxidizing dry strip chemistry, while easily removing the bulk photoresist layer, gave unacceptable ARC attack. For FEP photoresist an all-wet process was demonstrated, and for iP and NEB resists, promising results were achieved with less oxidizing dry strip chemistry." @default.
- W2084048347 created "2016-06-24" @default.
- W2084048347 creator A5007308874 @default.
- W2084048347 creator A5011276594 @default.
- W2084048347 creator A5020184889 @default.
- W2084048347 creator A5022607554 @default.
- W2084048347 creator A5040827942 @default.
- W2084048347 creator A5043302194 @default.
- W2084048347 creator A5052386371 @default.
- W2084048347 creator A5074813820 @default.
- W2084048347 creator A5084904410 @default.
- W2084048347 creator A5087740399 @default.
- W2084048347 date "2006-06-30" @default.
- W2084048347 modified "2023-09-23" @default.
- W2084048347 title "Advanced processes for photomask damage-free cleaning and photoresist removal" @default.
- W2084048347 cites W1507412811 @default.
- W2084048347 cites W2000129122 @default.
- W2084048347 cites W2019611778 @default.
- W2084048347 cites W2041516957 @default.
- W2084048347 cites W2055067019 @default.
- W2084048347 doi "https://doi.org/10.1117/12.692644" @default.
- W2084048347 hasPublicationYear "2006" @default.
- W2084048347 type Work @default.
- W2084048347 sameAs 2084048347 @default.
- W2084048347 citedByCount "1" @default.
- W2084048347 countsByYear W20840483472017 @default.
- W2084048347 crossrefType "proceedings-article" @default.
- W2084048347 hasAuthorship W2084048347A5007308874 @default.
- W2084048347 hasAuthorship W2084048347A5011276594 @default.
- W2084048347 hasAuthorship W2084048347A5020184889 @default.
- W2084048347 hasAuthorship W2084048347A5022607554 @default.
- W2084048347 hasAuthorship W2084048347A5040827942 @default.
- W2084048347 hasAuthorship W2084048347A5043302194 @default.
- W2084048347 hasAuthorship W2084048347A5052386371 @default.
- W2084048347 hasAuthorship W2084048347A5074813820 @default.
- W2084048347 hasAuthorship W2084048347A5084904410 @default.
- W2084048347 hasAuthorship W2084048347A5087740399 @default.
- W2084048347 hasConcept C105487726 @default.
- W2084048347 hasConcept C134406635 @default.
- W2084048347 hasConcept C159985019 @default.
- W2084048347 hasConcept C171250308 @default.
- W2084048347 hasConcept C178790620 @default.
- W2084048347 hasConcept C185592680 @default.
- W2084048347 hasConcept C192562407 @default.
- W2084048347 hasConcept C2778522843 @default.
- W2084048347 hasConcept C2779227376 @default.
- W2084048347 hasConcept C2780710336 @default.
- W2084048347 hasConcept C2781448156 @default.
- W2084048347 hasConcept C41952129 @default.
- W2084048347 hasConcept C53524968 @default.
- W2084048347 hasConcept C77176794 @default.
- W2084048347 hasConceptScore W2084048347C105487726 @default.
- W2084048347 hasConceptScore W2084048347C134406635 @default.
- W2084048347 hasConceptScore W2084048347C159985019 @default.
- W2084048347 hasConceptScore W2084048347C171250308 @default.
- W2084048347 hasConceptScore W2084048347C178790620 @default.
- W2084048347 hasConceptScore W2084048347C185592680 @default.
- W2084048347 hasConceptScore W2084048347C192562407 @default.
- W2084048347 hasConceptScore W2084048347C2778522843 @default.
- W2084048347 hasConceptScore W2084048347C2779227376 @default.
- W2084048347 hasConceptScore W2084048347C2780710336 @default.
- W2084048347 hasConceptScore W2084048347C2781448156 @default.
- W2084048347 hasConceptScore W2084048347C41952129 @default.
- W2084048347 hasConceptScore W2084048347C53524968 @default.
- W2084048347 hasConceptScore W2084048347C77176794 @default.
- W2084048347 hasLocation W20840483471 @default.
- W2084048347 hasOpenAccess W2084048347 @default.
- W2084048347 hasPrimaryLocation W20840483471 @default.
- W2084048347 hasRelatedWork W1933867914 @default.
- W2084048347 hasRelatedWork W1971081148 @default.
- W2084048347 hasRelatedWork W1973788924 @default.
- W2084048347 hasRelatedWork W2026384529 @default.
- W2084048347 hasRelatedWork W2028844463 @default.
- W2084048347 hasRelatedWork W2029996626 @default.
- W2084048347 hasRelatedWork W2129801267 @default.
- W2084048347 hasRelatedWork W2166730619 @default.
- W2084048347 hasRelatedWork W4281622355 @default.
- W2084048347 hasRelatedWork W74493060 @default.
- W2084048347 isParatext "false" @default.
- W2084048347 isRetracted "false" @default.
- W2084048347 magId "2084048347" @default.
- W2084048347 workType "article" @default.