FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2084133724> ?p ?o ?g. }

• W2084133724 endingPage "157" @default.
• W2084133724 startingPage "152" @default.
• W2084133724 abstract "Three-dimensional (3D) doping into depths up to 40 μm is of great interest for numerous device types. In particular, the production of high-power devices requires low cost vertically structured doping. State of the art epitaxial growth combined with diffusion and/or low-energy ion implantation is time consuming and cost intensive. We suggest 3D structured high-energy ion projection implantation as a simple cost effective and reliable alternative. This method allows controlled fast doping with high homogeneity and reproducibility. This article outlines some details of a feasibility study of the technique and discusses advantages and problems." @default.
• W2084133724 created "2016-06-24" @default.
• W2084133724 creator A5022303669 @default.
• W2084133724 creator A5023904010 @default.
• W2084133724 creator A5046763218 @default.
• W2084133724 creator A5052703056 @default.
• W2084133724 creator A5057705318 @default.
• W2084133724 creator A5060613662 @default.
• W2084133724 creator A5077101112 @default.
• W2084133724 date "2004-01-01" @default.
• W2084133724 modified "2023-09-27" @default.
• W2084133724 title "High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes" @default.
• W2084133724 cites W1981350406 @default.
• W2084133724 cites W1990093778 @default.
• W2084133724 cites W1998085044 @default.
• W2084133724 cites W2043123922 @default.
• W2084133724 cites W2046143264 @default.
• W2084133724 cites W2046204174 @default.
• W2084133724 cites W2055520467 @default.
• W2084133724 cites W2070082134 @default.
• W2084133724 cites W2079604548 @default.
• W2084133724 doi "https://doi.org/10.1116/1.1637917" @default.
• W2084133724 hasPublicationYear "2004" @default.
• W2084133724 type Work @default.
• W2084133724 sameAs 2084133724 @default.
• W2084133724 citedByCount "7" @default.
• W2084133724 countsByYear W20841337242012 @default.
• W2084133724 countsByYear W20841337242014 @default.
• W2084133724 crossrefType "journal-article" @default.
• W2084133724 hasAuthorship W2084133724A5022303669 @default.
• W2084133724 hasAuthorship W2084133724A5023904010 @default.
• W2084133724 hasAuthorship W2084133724A5046763218 @default.
• W2084133724 hasAuthorship W2084133724A5052703056 @default.
• W2084133724 hasAuthorship W2084133724A5057705318 @default.
• W2084133724 hasAuthorship W2084133724A5060613662 @default.
• W2084133724 hasAuthorship W2084133724A5077101112 @default.
• W2084133724 hasBestOaLocation W20841337241 @default.
• W2084133724 hasConcept C110738630 @default.
• W2084133724 hasConcept C119857082 @default.
• W2084133724 hasConcept C121332964 @default.
• W2084133724 hasConcept C127413603 @default.
• W2084133724 hasConcept C142259097 @default.
• W2084133724 hasConcept C145148216 @default.
• W2084133724 hasConcept C157764524 @default.
• W2084133724 hasConcept C171250308 @default.
• W2084133724 hasConcept C178790620 @default.
• W2084133724 hasConcept C184779094 @default.
• W2084133724 hasConcept C185592680 @default.
• W2084133724 hasConcept C192562407 @default.
• W2084133724 hasConcept C2779227376 @default.
• W2084133724 hasConcept C2985973956 @default.
• W2084133724 hasConcept C2989164559 @default.
• W2084133724 hasConcept C41008148 @default.
• W2084133724 hasConcept C41823505 @default.
• W2084133724 hasConcept C49040817 @default.
• W2084133724 hasConcept C555944384 @default.
• W2084133724 hasConcept C57863236 @default.
• W2084133724 hasConcept C61696701 @default.
• W2084133724 hasConcept C76155785 @default.
• W2084133724 hasConceptScore W2084133724C110738630 @default.
• W2084133724 hasConceptScore W2084133724C119857082 @default.
• W2084133724 hasConceptScore W2084133724C121332964 @default.
• W2084133724 hasConceptScore W2084133724C127413603 @default.
• W2084133724 hasConceptScore W2084133724C142259097 @default.
• W2084133724 hasConceptScore W2084133724C145148216 @default.
• W2084133724 hasConceptScore W2084133724C157764524 @default.
• W2084133724 hasConceptScore W2084133724C171250308 @default.
• W2084133724 hasConceptScore W2084133724C178790620 @default.
• W2084133724 hasConceptScore W2084133724C184779094 @default.
• W2084133724 hasConceptScore W2084133724C185592680 @default.
• W2084133724 hasConceptScore W2084133724C192562407 @default.
• W2084133724 hasConceptScore W2084133724C2779227376 @default.
• W2084133724 hasConceptScore W2084133724C2985973956 @default.
• W2084133724 hasConceptScore W2084133724C2989164559 @default.
• W2084133724 hasConceptScore W2084133724C41008148 @default.
• W2084133724 hasConceptScore W2084133724C41823505 @default.
• W2084133724 hasConceptScore W2084133724C49040817 @default.
• W2084133724 hasConceptScore W2084133724C555944384 @default.
• W2084133724 hasConceptScore W2084133724C57863236 @default.
• W2084133724 hasConceptScore W2084133724C61696701 @default.
• W2084133724 hasConceptScore W2084133724C76155785 @default.
• W2084133724 hasIssue "1" @default.
• W2084133724 hasLocation W20841337241 @default.
• W2084133724 hasOpenAccess W2084133724 @default.
• W2084133724 hasPrimaryLocation W20841337241 @default.
• W2084133724 hasRelatedWork W1966399772 @default.
• W2084133724 hasRelatedWork W2002162050 @default.
• W2084133724 hasRelatedWork W2011223561 @default.
• W2084133724 hasRelatedWork W2019761405 @default.
• W2084133724 hasRelatedWork W2081645594 @default.
• W2084133724 hasRelatedWork W2085540852 @default.
• W2084133724 hasRelatedWork W2104399223 @default.
• W2084133724 hasRelatedWork W2386727905 @default.
• W2084133724 hasRelatedWork W1963762072 @default.
• W2084133724 hasRelatedWork W2093344931 @default.
• W2084133724 hasVolume "22" @default.
• W2084133724 isParatext "false" @default.
• W2084133724 isRetracted "false" @default.

• next