Matches in SemOpenAlex for { <https://semopenalex.org/work/W2084156982> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2084156982 abstract "In this paper, a MEMS capacitive pressure sensor, fabricated using a novel manufacturing process without the need of wafer bonding, is presented. The sensor is composed of a polysilicon membrane that deflects due to pressure difference applied over it. Two operation regions are observed: a non-linear sensitivity region at low pressure (0-30 kPa) and a linear one (30-200 kPa) in touch mode. A capacitance-to-frequency conversion circuitry is designed and validated to provide a sensitive sensing module. Experimental results show a sensitivity of 28.7 fF/kPa and of 13.93 Hz/kPa in the non-linear region. Finally, the microsensor is characterized as a RF MEMS tunable capacitor, in order to be used in radiofrequency applications, and parameters such as tuning ratio and quality factor are obtained. Among the most significant features of this device are versatility, high reliability, integrability, and high sensitivity." @default.
- W2084156982 created "2016-06-24" @default.
- W2084156982 creator A5008090156 @default.
- W2084156982 creator A5023773921 @default.
- W2084156982 creator A5085265715 @default.
- W2084156982 date "2007-06-01" @default.
- W2084156982 modified "2023-10-01" @default.
- W2084156982 title "Capacitive Pressure Sensor and Characterization as RF MEMS Device" @default.
- W2084156982 cites W1973191872 @default.
- W2084156982 cites W1978384297 @default.
- W2084156982 cites W2010855258 @default.
- W2084156982 cites W2053089047 @default.
- W2084156982 cites W2100649390 @default.
- W2084156982 cites W2124759908 @default.
- W2084156982 cites W2148365304 @default.
- W2084156982 cites W2151885653 @default.
- W2084156982 cites W2154242717 @default.
- W2084156982 cites W2162634804 @default.
- W2084156982 cites W2171062723 @default.
- W2084156982 cites W3120151837 @default.
- W2084156982 doi "https://doi.org/10.1109/isie.2007.4375138" @default.
- W2084156982 hasPublicationYear "2007" @default.
- W2084156982 type Work @default.
- W2084156982 sameAs 2084156982 @default.
- W2084156982 citedByCount "3" @default.
- W2084156982 countsByYear W20841569822012 @default.
- W2084156982 crossrefType "proceedings-article" @default.
- W2084156982 hasAuthorship W2084156982A5008090156 @default.
- W2084156982 hasAuthorship W2084156982A5023773921 @default.
- W2084156982 hasAuthorship W2084156982A5085265715 @default.
- W2084156982 hasConcept C119599485 @default.
- W2084156982 hasConcept C127413603 @default.
- W2084156982 hasConcept C147789679 @default.
- W2084156982 hasConcept C160671074 @default.
- W2084156982 hasConcept C165801399 @default.
- W2084156982 hasConcept C17525397 @default.
- W2084156982 hasConcept C185592680 @default.
- W2084156982 hasConcept C192562407 @default.
- W2084156982 hasConcept C206755178 @default.
- W2084156982 hasConcept C21200559 @default.
- W2084156982 hasConcept C24326235 @default.
- W2084156982 hasConcept C30066665 @default.
- W2084156982 hasConcept C37977207 @default.
- W2084156982 hasConcept C41325743 @default.
- W2084156982 hasConcept C49040817 @default.
- W2084156982 hasConcept C52192207 @default.
- W2084156982 hasConcept C78519656 @default.
- W2084156982 hasConceptScore W2084156982C119599485 @default.
- W2084156982 hasConceptScore W2084156982C127413603 @default.
- W2084156982 hasConceptScore W2084156982C147789679 @default.
- W2084156982 hasConceptScore W2084156982C160671074 @default.
- W2084156982 hasConceptScore W2084156982C165801399 @default.
- W2084156982 hasConceptScore W2084156982C17525397 @default.
- W2084156982 hasConceptScore W2084156982C185592680 @default.
- W2084156982 hasConceptScore W2084156982C192562407 @default.
- W2084156982 hasConceptScore W2084156982C206755178 @default.
- W2084156982 hasConceptScore W2084156982C21200559 @default.
- W2084156982 hasConceptScore W2084156982C24326235 @default.
- W2084156982 hasConceptScore W2084156982C30066665 @default.
- W2084156982 hasConceptScore W2084156982C37977207 @default.
- W2084156982 hasConceptScore W2084156982C41325743 @default.
- W2084156982 hasConceptScore W2084156982C49040817 @default.
- W2084156982 hasConceptScore W2084156982C52192207 @default.
- W2084156982 hasConceptScore W2084156982C78519656 @default.
- W2084156982 hasLocation W20841569821 @default.
- W2084156982 hasOpenAccess W2084156982 @default.
- W2084156982 hasPrimaryLocation W20841569821 @default.
- W2084156982 hasRelatedWork W2007293688 @default.
- W2084156982 hasRelatedWork W2043951612 @default.
- W2084156982 hasRelatedWork W2058393115 @default.
- W2084156982 hasRelatedWork W2102625889 @default.
- W2084156982 hasRelatedWork W2161640727 @default.
- W2084156982 hasRelatedWork W2162249554 @default.
- W2084156982 hasRelatedWork W233727244 @default.
- W2084156982 hasRelatedWork W2393086701 @default.
- W2084156982 hasRelatedWork W2897145040 @default.
- W2084156982 hasRelatedWork W3198072635 @default.
- W2084156982 isParatext "false" @default.
- W2084156982 isRetracted "false" @default.
- W2084156982 magId "2084156982" @default.
- W2084156982 workType "article" @default.