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- W2084221470 abstract "The influence of Ar metastable atoms on the discharge structure in rf glow discharges is investigated in Ar and N 2 mixed gas experimentally and theoretically. The purpose of adding a small amount of N 2 is to control the metastable density. Time- and space-resolved optical emission spectroscopy is applied to investigate the behavior of high-energy electrons. The density profile of Ar metastables in Ar and N 2 mixture is estimated from the optical emission intensity of the second positive band of N 2 , which results from the energy transfer from Ar metastables to N 2 molecules. The decreases of current and optical emission intensity, as well as the Ar metastable density with increase of N 2 ratio, are observed. It is concluded that ionization through metastables is one of the important processes in increasing the plasma density, especially at higher pressures." @default.
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- W2084221470 date "1994-07-01" @default.
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- W2084221470 title "Influence of Ar Metastable on the Discharge Structure in Ar and N<sub>2</sub> Mixture in RF Discharges at 13.56 MHz" @default.
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- W2084221470 doi "https://doi.org/10.1143/jjap.33.4271" @default.
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