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- W2084296777 abstract "Thick silicon dioxide layers (1.5 μm) have been nitrided in a lamp-heated furnace in an ammonia ambient. Temperatures of 700–1100°C were used for the nitridation for times of 5 to 300 s at atmospheric pressure. The distribution of the nitrogen in the nitrided samples was obtained using SIMS. The exponential shapes of the nitrogen profiles have been interpreted by a mechanism involving diffusion of the nitriding groups (NH3) with a reaction with the network. We obtained the values of the effective diffusivity D∗ = DNH3C0Ni and of the reactivity k∗ = kcnC0Ni correlated by the length of exchange x0 = (D∗k∗)12. It appears that the increase of k∗ with the temperature is larger than the increase of D∗. This finding implies a shorter length of exchange at high temperature than at low temperature." @default.
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- W2084296777 date "1994-10-01" @default.
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- W2084296777 title "SIMS study of rapid thermal nitridation of silicon dioxide thick films in ammonia ambient" @default.
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- W2084296777 doi "https://doi.org/10.1016/0169-4332(94)00173-1" @default.
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