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• W2084529687 endingPage "1452" @default.
• W2084529687 startingPage "1446" @default.
• W2084529687 abstract "Microwave plasma assisted synthesis of diamond is experimentally investigated using high purity, 2–5% CH4/H2 input gas chemistries and operating at high pressures of 180–240 Torr. A microwave cavity plasma reactor (MCPR) was specifically modified to be experimentally adjustable and to enable operation with high input microwave plasma absorbed power densities within the high-pressure regime. The modified reactor produced intense microwave discharges with variable absorbed power densities of 150–475 W/cm3 and allowed the control of the discharge position, size, and shape thereby enabling process optimization. Uniform polycrystalline diamond films were synthesized on 2.54 cm diameter silicon substrates at substrate temperatures of 950–1150 °C. Thick, freestanding diamond films were synthesized and optical measurements indicated that high, optical-quality diamond films were produced. The deposition rates varied between 3 and 21 μm/h and increased as the operating pressure and the methane concentrations increased and were two to three times higher than deposition rates achieved with the MCPR operating with equivalent input methane concentrations and at lower pressures (≤ 140 Torr) and power densities." @default.
• W2084529687 created "2016-06-24" @default.
• W2084529687 creator A5005062487 @default.
• W2084529687 creator A5011522286 @default.
• W2084529687 creator A5026899079 @default.
• W2084529687 creator A5045362221 @default.
• W2084529687 date "2010-12-01" @default.
• W2084529687 modified "2023-10-17" @default.
• W2084529687 title "Improved microwave plasma cavity reactor for diamond synthesis at high-pressure and high power density" @default.
• W2084529687 cites W1963656915 @default.
• W2084529687 cites W1972880449 @default.
• W2084529687 cites W1978478307 @default.
• W2084529687 cites W1981164074 @default.
• W2084529687 cites W1992428086 @default.
• W2084529687 cites W2004728407 @default.
• W2084529687 cites W2024707364 @default.
• W2084529687 cites W2027143733 @default.
• W2084529687 cites W2031033704 @default.
• W2084529687 cites W2035091652 @default.
• W2084529687 cites W2036477141 @default.
• W2084529687 cites W2038155398 @default.
• W2084529687 cites W2061342305 @default.
• W2084529687 cites W2061961086 @default.
• W2084529687 cites W2079423693 @default.
• W2084529687 cites W2087225629 @default.
• W2084529687 cites W2093757203 @default.
• W2084529687 cites W2128353329 @default.
• W2084529687 doi "https://doi.org/10.1016/j.diamond.2010.07.005" @default.
• W2084529687 hasPublicationYear "2010" @default.
• W2084529687 type Work @default.
• W2084529687 sameAs 2084529687 @default.
• W2084529687 citedByCount "57" @default.
• W2084529687 countsByYear W20845296872012 @default.
• W2084529687 countsByYear W20845296872013 @default.
• W2084529687 countsByYear W20845296872014 @default.
• W2084529687 countsByYear W20845296872015 @default.
• W2084529687 countsByYear W20845296872016 @default.
• W2084529687 countsByYear W20845296872017 @default.
• W2084529687 countsByYear W20845296872018 @default.
• W2084529687 countsByYear W20845296872019 @default.
• W2084529687 countsByYear W20845296872020 @default.
• W2084529687 countsByYear W20845296872021 @default.
• W2084529687 countsByYear W20845296872022 @default.
• W2084529687 countsByYear W20845296872023 @default.
• W2084529687 crossrefType "journal-article" @default.
• W2084529687 hasAuthorship W2084529687A5005062487 @default.
• W2084529687 hasAuthorship W2084529687A5011522286 @default.
• W2084529687 hasAuthorship W2084529687A5026899079 @default.
• W2084529687 hasAuthorship W2084529687A5045362221 @default.
• W2084529687 hasConcept C111368507 @default.
• W2084529687 hasConcept C113196181 @default.
• W2084529687 hasConcept C121332964 @default.
• W2084529687 hasConcept C127313418 @default.
• W2084529687 hasConcept C159985019 @default.
• W2084529687 hasConcept C163258240 @default.
• W2084529687 hasConcept C178790620 @default.
• W2084529687 hasConcept C185592680 @default.
• W2084529687 hasConcept C186397771 @default.
• W2084529687 hasConcept C192562407 @default.
• W2084529687 hasConcept C21881925 @default.
• W2084529687 hasConcept C2776921476 @default.
• W2084529687 hasConcept C2777289219 @default.
• W2084529687 hasConcept C2778583532 @default.
• W2084529687 hasConcept C30646810 @default.
• W2084529687 hasConcept C43617362 @default.
• W2084529687 hasConcept C44838205 @default.
• W2084529687 hasConcept C49040817 @default.
• W2084529687 hasConcept C516920438 @default.
• W2084529687 hasConcept C544956773 @default.
• W2084529687 hasConcept C57410435 @default.
• W2084529687 hasConcept C62520636 @default.
• W2084529687 hasConcept C82706917 @default.
• W2084529687 hasConcept C97355855 @default.
• W2084529687 hasConceptScore W2084529687C111368507 @default.
• W2084529687 hasConceptScore W2084529687C113196181 @default.
• W2084529687 hasConceptScore W2084529687C121332964 @default.
• W2084529687 hasConceptScore W2084529687C127313418 @default.
• W2084529687 hasConceptScore W2084529687C159985019 @default.
• W2084529687 hasConceptScore W2084529687C163258240 @default.
• W2084529687 hasConceptScore W2084529687C178790620 @default.
• W2084529687 hasConceptScore W2084529687C185592680 @default.
• W2084529687 hasConceptScore W2084529687C186397771 @default.
• W2084529687 hasConceptScore W2084529687C192562407 @default.
• W2084529687 hasConceptScore W2084529687C21881925 @default.
• W2084529687 hasConceptScore W2084529687C2776921476 @default.
• W2084529687 hasConceptScore W2084529687C2777289219 @default.
• W2084529687 hasConceptScore W2084529687C2778583532 @default.
• W2084529687 hasConceptScore W2084529687C30646810 @default.
• W2084529687 hasConceptScore W2084529687C43617362 @default.
• W2084529687 hasConceptScore W2084529687C44838205 @default.
• W2084529687 hasConceptScore W2084529687C49040817 @default.
• W2084529687 hasConceptScore W2084529687C516920438 @default.
• W2084529687 hasConceptScore W2084529687C544956773 @default.
• W2084529687 hasConceptScore W2084529687C57410435 @default.
• W2084529687 hasConceptScore W2084529687C62520636 @default.
• W2084529687 hasConceptScore W2084529687C82706917 @default.
• W2084529687 hasConceptScore W2084529687C97355855 @default.
• W2084529687 hasIssue "12" @default.

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