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- W2084752023 abstract "Abstract A thin-film thermal vacuum sensor has been investigated. The sensor consists of two plates arranged vertically, one above the other. On the plate of glass foil with a thickness of 0.1 mm, NiCr heating resistor and a six-element GeAu–Ni thermopile were located. Heat exchange took place mainly by means of free convection, which resulted in significant sensitivity increase in the pressure range above 10 3 Pa. For pressure measurement, the voltage of the thermopile either from the upper or bottom plate could be used, depending on the measurement range. The sensor is able to measure pressure in the range from 10 −2 to 10 5 Pa." @default.
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- W2084752023 date "2000-06-01" @default.
- W2084752023 modified "2023-09-26" @default.
- W2084752023 title "Convection–conductive vacuum sensor" @default.
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- W2084752023 doi "https://doi.org/10.1016/s0042-207x(00)00153-6" @default.
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