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• W2085024863 endingPage "2620" @default.
• W2085024863 startingPage "2616" @default.
• W2085024863 abstract "The impact of the Zr/Hf ratio on the reliability of a HfZrOX gate dielectric has been investigated in detail. By a frequency-varied charge-pumping method, we found that the density of bulk traps is reduced with increasing Zr content. Also, a comparable Dit value observed by the rising/falling time-varied charge-pumping method suggests that Zr incorporation does not degrade the interface quality. Consequently, mobility increases with increasing Zr content in the HfZrOX dielectric and ∼25% mobility enhancement compared with that of HfO2 can be observed. However, the bulk trap density reduction reaches saturation at a higher Zr content. The improvement in positive-bias temperature instability (PBTI) was also demonstrated by both DC and pulse techniques. The smaller Vth shift in PBTI is attributed to the reduction of fast trapping and the generation of slow traps. Finally, a reduced gate-induced drain leakage current (GIDL) was also observed with increasing Zr content because of the reduction of trap-assisted tunneling in a high-k film." @default.
• W2085024863 created "2016-06-24" @default.
• W2085024863 creator A5013917639 @default.
• W2085024863 creator A5016700728 @default.
• W2085024863 creator A5026969788 @default.
• W2085024863 creator A5046455240 @default.
• W2085024863 creator A5053688305 @default.
• W2085024863 creator A5056366986 @default.
• W2085024863 creator A5059073982 @default.
• W2085024863 creator A5063751449 @default.
• W2085024863 creator A5072269853 @default.
• W2085024863 creator A5081929210 @default.
• W2085024863 creator A5083109546 @default.
• W2085024863 date "2008-04-25" @default.
• W2085024863 modified "2023-10-17" @default.
• W2085024863 title "Observation of Reliability of HfZrO_<i>X</i>Gate Dielectric Devices with Different Zr/Hf Ratios" @default.
• W2085024863 cites W1976809709 @default.
• W2085024863 cites W2005826182 @default.
• W2085024863 cites W2017820620 @default.
• W2085024863 cites W2069362588 @default.
• W2085024863 cites W2134511326 @default.
• W2085024863 cites W2139424966 @default.
• W2085024863 doi "https://doi.org/10.1143/jjap.47.2616" @default.
• W2085024863 hasPublicationYear "2008" @default.
• W2085024863 type Work @default.
• W2085024863 sameAs 2085024863 @default.
• W2085024863 citedByCount "7" @default.
• W2085024863 countsByYear W20850248632012 @default.
• W2085024863 countsByYear W20850248632014 @default.
• W2085024863 crossrefType "journal-article" @default.
• W2085024863 hasAuthorship W2085024863A5013917639 @default.
• W2085024863 hasAuthorship W2085024863A5016700728 @default.
• W2085024863 hasAuthorship W2085024863A5026969788 @default.
• W2085024863 hasAuthorship W2085024863A5046455240 @default.
• W2085024863 hasAuthorship W2085024863A5053688305 @default.
• W2085024863 hasAuthorship W2085024863A5056366986 @default.
• W2085024863 hasAuthorship W2085024863A5059073982 @default.
• W2085024863 hasAuthorship W2085024863A5063751449 @default.
• W2085024863 hasAuthorship W2085024863A5072269853 @default.
• W2085024863 hasAuthorship W2085024863A5081929210 @default.
• W2085024863 hasAuthorship W2085024863A5083109546 @default.
• W2085024863 hasConcept C113196181 @default.
• W2085024863 hasConcept C114614502 @default.
• W2085024863 hasConcept C119599485 @default.
• W2085024863 hasConcept C120398109 @default.
• W2085024863 hasConcept C127413603 @default.
• W2085024863 hasConcept C133386390 @default.
• W2085024863 hasConcept C139719470 @default.
• W2085024863 hasConcept C162324750 @default.
• W2085024863 hasConcept C16317505 @default.
• W2085024863 hasConcept C165801399 @default.
• W2085024863 hasConcept C166972891 @default.
• W2085024863 hasConcept C172385210 @default.
• W2085024863 hasConcept C185592680 @default.
• W2085024863 hasConcept C18903297 @default.
• W2085024863 hasConcept C192562407 @default.
• W2085024863 hasConcept C2777042071 @default.
• W2085024863 hasConcept C2777924906 @default.
• W2085024863 hasConcept C33923547 @default.
• W2085024863 hasConcept C43617362 @default.
• W2085024863 hasConcept C49040817 @default.
• W2085024863 hasConcept C86803240 @default.
• W2085024863 hasConcept C9930424 @default.
• W2085024863 hasConceptScore W2085024863C113196181 @default.
• W2085024863 hasConceptScore W2085024863C114614502 @default.
• W2085024863 hasConceptScore W2085024863C119599485 @default.
• W2085024863 hasConceptScore W2085024863C120398109 @default.
• W2085024863 hasConceptScore W2085024863C127413603 @default.
• W2085024863 hasConceptScore W2085024863C133386390 @default.
• W2085024863 hasConceptScore W2085024863C139719470 @default.
• W2085024863 hasConceptScore W2085024863C162324750 @default.
• W2085024863 hasConceptScore W2085024863C16317505 @default.
• W2085024863 hasConceptScore W2085024863C165801399 @default.
• W2085024863 hasConceptScore W2085024863C166972891 @default.
• W2085024863 hasConceptScore W2085024863C172385210 @default.
• W2085024863 hasConceptScore W2085024863C185592680 @default.
• W2085024863 hasConceptScore W2085024863C18903297 @default.
• W2085024863 hasConceptScore W2085024863C192562407 @default.
• W2085024863 hasConceptScore W2085024863C2777042071 @default.
• W2085024863 hasConceptScore W2085024863C2777924906 @default.
• W2085024863 hasConceptScore W2085024863C33923547 @default.
• W2085024863 hasConceptScore W2085024863C43617362 @default.
• W2085024863 hasConceptScore W2085024863C49040817 @default.
• W2085024863 hasConceptScore W2085024863C86803240 @default.
• W2085024863 hasConceptScore W2085024863C9930424 @default.
• W2085024863 hasIssue "4" @default.
• W2085024863 hasLocation W20850248631 @default.
• W2085024863 hasOpenAccess W2085024863 @default.
• W2085024863 hasPrimaryLocation W20850248631 @default.
• W2085024863 hasRelatedWork W1501872004 @default.
• W2085024863 hasRelatedWork W2027252288 @default.
• W2085024863 hasRelatedWork W2144830545 @default.
• W2085024863 hasRelatedWork W2359906914 @default.
• W2085024863 hasRelatedWork W2368176392 @default.
• W2085024863 hasRelatedWork W2561063927 @default.
• W2085024863 hasRelatedWork W2890924564 @default.
• W2085024863 hasRelatedWork W2903976092 @default.
• W2085024863 hasRelatedWork W4253731651 @default.

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