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• W2085136293 abstract "We developed a novel optical micro-cantilever for scanning near-field optical microscopy (SNOM), evaluated its mechanical properties, and applied it for SNOM. A cantilever-shaped channel waveguide with an aperture is bent and it is operated in atomic force mode. By combining the conventional lithography techniques and the waveguide bending process, we can fabricate a probe with the shape and the mechanical properties most desirable for given samples and conditions. Our optical micro-cantilever has resonance frequency similar to the conventional optical fiber probe, and it has a spring constant much smaller. We used this optical micro-cantilever for SNOM in contact mode, and confirmed that it gives optical images with a resolution beyond the diffraction limit." @default.
• W2085136293 created "2016-06-24" @default.
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• W2085136293 date "1999-01-01" @default.
• W2085136293 modified "2023-09-27" @default.
• W2085136293 title "Fabrication of optical micro-cantilever consisting of channel waveguide for scanning near-field optical microscopy controlled by atomic force" @default.
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• W2085136293 doi "https://doi.org/10.1109/memsys.1999.746854" @default.
• W2085136293 hasPublicationYear "1999" @default.
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