Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085137679> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2085137679 endingPage "3839" @default.
- W2085137679 startingPage "3839" @default.
- W2085137679 abstract "Recently scanning tunneling microscopes (STMs) have become important tools for nanometer scale fabrication. In order to make a nanoscale structure on a semiconductor surface, we attempted to lithograph very fine lines (possibly less than 10 nm) by using a resist process with an STM as an electron beam source. A diluted positive electron beam resist, poly-methyl methacrylate (PMMA), was first coated on a S-doped GaAs substrate. Using the STM in air, we approached a W-tip to the surface at a bias voltage of 10 V and a tunneling current of 0.5 nA, and made a line using by scanning the tip with various scan times. We then analyzed those lines made by the STM tip using an atomic force microscope (AFM) in air. After these processes, we deposited a Ti membrane on the sample surface by vacuum evaporation, then lifted it off. As a result, we confirmed that it was possible to make fine Ti lines as narrow as 50 nm by this process." @default.
- W2085137679 created "2016-06-24" @default.
- W2085137679 creator A5027789989 @default.
- W2085137679 creator A5036590014 @default.
- W2085137679 creator A5040769674 @default.
- W2085137679 creator A5041816621 @default.
- W2085137679 date "1997-06-01" @default.
- W2085137679 modified "2023-09-24" @default.
- W2085137679 title "Nano-Fabrication on GaAs Surface by Resist Process with Scanning Tunneling Microscope Lithography" @default.
- W2085137679 cites W1975706739 @default.
- W2085137679 cites W1990155158 @default.
- W2085137679 cites W2048098569 @default.
- W2085137679 cites W2145114911 @default.
- W2085137679 cites W2162957145 @default.
- W2085137679 doi "https://doi.org/10.1143/jjap.36.3839" @default.
- W2085137679 hasPublicationYear "1997" @default.
- W2085137679 type Work @default.
- W2085137679 sameAs 2085137679 @default.
- W2085137679 citedByCount "12" @default.
- W2085137679 crossrefType "journal-article" @default.
- W2085137679 hasAuthorship W2085137679A5027789989 @default.
- W2085137679 hasAuthorship W2085137679A5036590014 @default.
- W2085137679 hasAuthorship W2085137679A5040769674 @default.
- W2085137679 hasAuthorship W2085137679A5041816621 @default.
- W2085137679 hasConcept C111368507 @default.
- W2085137679 hasConcept C121332964 @default.
- W2085137679 hasConcept C127313418 @default.
- W2085137679 hasConcept C136525101 @default.
- W2085137679 hasConcept C142724271 @default.
- W2085137679 hasConcept C159985019 @default.
- W2085137679 hasConcept C162117346 @default.
- W2085137679 hasConcept C171250308 @default.
- W2085137679 hasConcept C19067145 @default.
- W2085137679 hasConcept C192562407 @default.
- W2085137679 hasConcept C194577767 @default.
- W2085137679 hasConcept C200274948 @default.
- W2085137679 hasConcept C204223013 @default.
- W2085137679 hasConcept C204787440 @default.
- W2085137679 hasConcept C26771246 @default.
- W2085137679 hasConcept C2777289219 @default.
- W2085137679 hasConcept C2779192298 @default.
- W2085137679 hasConcept C2779227376 @default.
- W2085137679 hasConcept C36628996 @default.
- W2085137679 hasConcept C49040817 @default.
- W2085137679 hasConcept C53524968 @default.
- W2085137679 hasConcept C5408304 @default.
- W2085137679 hasConcept C61441594 @default.
- W2085137679 hasConcept C6518042 @default.
- W2085137679 hasConcept C71924100 @default.
- W2085137679 hasConcept C97355855 @default.
- W2085137679 hasConceptScore W2085137679C111368507 @default.
- W2085137679 hasConceptScore W2085137679C121332964 @default.
- W2085137679 hasConceptScore W2085137679C127313418 @default.
- W2085137679 hasConceptScore W2085137679C136525101 @default.
- W2085137679 hasConceptScore W2085137679C142724271 @default.
- W2085137679 hasConceptScore W2085137679C159985019 @default.
- W2085137679 hasConceptScore W2085137679C162117346 @default.
- W2085137679 hasConceptScore W2085137679C171250308 @default.
- W2085137679 hasConceptScore W2085137679C19067145 @default.
- W2085137679 hasConceptScore W2085137679C192562407 @default.
- W2085137679 hasConceptScore W2085137679C194577767 @default.
- W2085137679 hasConceptScore W2085137679C200274948 @default.
- W2085137679 hasConceptScore W2085137679C204223013 @default.
- W2085137679 hasConceptScore W2085137679C204787440 @default.
- W2085137679 hasConceptScore W2085137679C26771246 @default.
- W2085137679 hasConceptScore W2085137679C2777289219 @default.
- W2085137679 hasConceptScore W2085137679C2779192298 @default.
- W2085137679 hasConceptScore W2085137679C2779227376 @default.
- W2085137679 hasConceptScore W2085137679C36628996 @default.
- W2085137679 hasConceptScore W2085137679C49040817 @default.
- W2085137679 hasConceptScore W2085137679C53524968 @default.
- W2085137679 hasConceptScore W2085137679C5408304 @default.
- W2085137679 hasConceptScore W2085137679C61441594 @default.
- W2085137679 hasConceptScore W2085137679C6518042 @default.
- W2085137679 hasConceptScore W2085137679C71924100 @default.
- W2085137679 hasConceptScore W2085137679C97355855 @default.
- W2085137679 hasIssue "6S" @default.
- W2085137679 hasLocation W20851376791 @default.
- W2085137679 hasOpenAccess W2085137679 @default.
- W2085137679 hasPrimaryLocation W20851376791 @default.
- W2085137679 hasRelatedWork W137372576 @default.
- W2085137679 hasRelatedWork W2047600317 @default.
- W2085137679 hasRelatedWork W2058331958 @default.
- W2085137679 hasRelatedWork W2060239808 @default.
- W2085137679 hasRelatedWork W2067927400 @default.
- W2085137679 hasRelatedWork W2071702983 @default.
- W2085137679 hasRelatedWork W2085137679 @default.
- W2085137679 hasRelatedWork W2381245164 @default.
- W2085137679 hasRelatedWork W2764750957 @default.
- W2085137679 hasRelatedWork W2890402440 @default.
- W2085137679 hasVolume "36" @default.
- W2085137679 isParatext "false" @default.
- W2085137679 isRetracted "false" @default.
- W2085137679 magId "2085137679" @default.
- W2085137679 workType "article" @default.