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- W2085147114 abstract "We have developed and brought into operation a new type of scanning soft x-ray microscope which can operate at any photon energy from 20 to 1300 eV. This microscope demagnifies a diaphragm by means of an annular section of an ellipsoidal mirror to a smallest spot size of, at present, about 0.4 μm (FWHM), certainly containing only a small fraction of the total intensity. The sample is scanned across this spot. Between mirror and focus a free space of 30 mm is available for detectors, and particles emitted from a surface at more than 30° to the normal can be extracted into a mass or energy analyzer. Transmission, photoemission, luminescence, photostimulated desorption, reflectivity, and other signals may serve for imaging. In addition, a static analysis of very small samples or spots on a sample will become feasible." @default.
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- W2085147114 date "1992-01-01" @default.
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- W2085147114 title "A Scanning Soft X-Ray Microscope with an Ellipsoidal Focusing Mirror" @default.
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- W2085147114 doi "https://doi.org/10.3233/xst-1992-3202" @default.
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