Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085199105> ?p ?o ?g. }
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- W2085199105 endingPage "993" @default.
- W2085199105 startingPage "989" @default.
- W2085199105 abstract "Oxidized nanocrystalline (nc) Si:H film has been produced by plasma enhanced chemical vapor deposition with a high hydrogen diluted silane and followed by thermal oxidization in a conventional furnace at a relatively low temperature of 800 °C. The resulting films were studied using cross-sectional transmission electron microscopy, high-resolution transmission electron microscopy and x-ray photoelectron spectroscopy. It is found that nc-Si dots embedded in an a-SiO2 matrix can be formed by the above method and some of them exhibit the columnar growth morphology. Both the nc-Si:H deposition and the later thermal treatment are revealed to contribute to the film microstructures. It is further suggested that by choosing optimum oxidation time, the size of Si nanoparticles can be well controlled." @default.
- W2085199105 created "2016-06-24" @default.
- W2085199105 creator A5000432967 @default.
- W2085199105 creator A5017625964 @default.
- W2085199105 creator A5082963062 @default.
- W2085199105 creator A5086257118 @default.
- W2085199105 creator A5086525905 @default.
- W2085199105 date "1999-05-01" @default.
- W2085199105 modified "2023-10-16" @default.
- W2085199105 title "Microstructure characterization of oxidized nanocrystalline Si:H film by transmission electron microscopy" @default.
- W2085199105 cites W1967860472 @default.
- W2085199105 cites W1983090183 @default.
- W2085199105 cites W1983372907 @default.
- W2085199105 cites W1995618868 @default.
- W2085199105 cites W1995689081 @default.
- W2085199105 cites W1996445486 @default.
- W2085199105 cites W2000583432 @default.
- W2085199105 cites W2000650066 @default.
- W2085199105 cites W2006862733 @default.
- W2085199105 cites W2009868020 @default.
- W2085199105 cites W2020357254 @default.
- W2085199105 cites W2034138797 @default.
- W2085199105 cites W2048739334 @default.
- W2085199105 cites W2063709645 @default.
- W2085199105 cites W2072374192 @default.
- W2085199105 cites W2080430206 @default.
- W2085199105 cites W2082313027 @default.
- W2085199105 cites W2085166047 @default.
- W2085199105 cites W2086008429 @default.
- W2085199105 cites W2086867793 @default.
- W2085199105 cites W2094046053 @default.
- W2085199105 cites W2127259452 @default.
- W2085199105 cites W2332445647 @default.
- W2085199105 doi "https://doi.org/10.1116/1.590681" @default.
- W2085199105 hasPublicationYear "1999" @default.
- W2085199105 type Work @default.
- W2085199105 sameAs 2085199105 @default.
- W2085199105 citedByCount "1" @default.
- W2085199105 countsByYear W20851991052016 @default.
- W2085199105 crossrefType "journal-article" @default.
- W2085199105 hasAuthorship W2085199105A5000432967 @default.
- W2085199105 hasAuthorship W2085199105A5017625964 @default.
- W2085199105 hasAuthorship W2085199105A5082963062 @default.
- W2085199105 hasAuthorship W2085199105A5086257118 @default.
- W2085199105 hasAuthorship W2085199105A5086525905 @default.
- W2085199105 hasConcept C113196181 @default.
- W2085199105 hasConcept C127413603 @default.
- W2085199105 hasConcept C140676511 @default.
- W2085199105 hasConcept C146088050 @default.
- W2085199105 hasConcept C155672457 @default.
- W2085199105 hasConcept C159985019 @default.
- W2085199105 hasConcept C161368742 @default.
- W2085199105 hasConcept C171250308 @default.
- W2085199105 hasConcept C175708663 @default.
- W2085199105 hasConcept C185592680 @default.
- W2085199105 hasConcept C192562407 @default.
- W2085199105 hasConcept C26771246 @default.
- W2085199105 hasConcept C2778024649 @default.
- W2085199105 hasConcept C42360764 @default.
- W2085199105 hasConcept C43617362 @default.
- W2085199105 hasConcept C57410435 @default.
- W2085199105 hasConcept C87976508 @default.
- W2085199105 hasConceptScore W2085199105C113196181 @default.
- W2085199105 hasConceptScore W2085199105C127413603 @default.
- W2085199105 hasConceptScore W2085199105C140676511 @default.
- W2085199105 hasConceptScore W2085199105C146088050 @default.
- W2085199105 hasConceptScore W2085199105C155672457 @default.
- W2085199105 hasConceptScore W2085199105C159985019 @default.
- W2085199105 hasConceptScore W2085199105C161368742 @default.
- W2085199105 hasConceptScore W2085199105C171250308 @default.
- W2085199105 hasConceptScore W2085199105C175708663 @default.
- W2085199105 hasConceptScore W2085199105C185592680 @default.
- W2085199105 hasConceptScore W2085199105C192562407 @default.
- W2085199105 hasConceptScore W2085199105C26771246 @default.
- W2085199105 hasConceptScore W2085199105C2778024649 @default.
- W2085199105 hasConceptScore W2085199105C42360764 @default.
- W2085199105 hasConceptScore W2085199105C43617362 @default.
- W2085199105 hasConceptScore W2085199105C57410435 @default.
- W2085199105 hasConceptScore W2085199105C87976508 @default.
- W2085199105 hasIssue "3" @default.
- W2085199105 hasLocation W20851991051 @default.
- W2085199105 hasOpenAccess W2085199105 @default.
- W2085199105 hasPrimaryLocation W20851991051 @default.
- W2085199105 hasRelatedWork W1479926251 @default.
- W2085199105 hasRelatedWork W1975884723 @default.
- W2085199105 hasRelatedWork W1979201029 @default.
- W2085199105 hasRelatedWork W2020349643 @default.
- W2085199105 hasRelatedWork W2038371548 @default.
- W2085199105 hasRelatedWork W2075219058 @default.
- W2085199105 hasRelatedWork W2513424567 @default.
- W2085199105 hasRelatedWork W4245340404 @default.
- W2085199105 hasRelatedWork W4381712472 @default.
- W2085199105 hasRelatedWork W990878371 @default.
- W2085199105 hasVolume "17" @default.
- W2085199105 isParatext "false" @default.
- W2085199105 isRetracted "false" @default.
- W2085199105 magId "2085199105" @default.
- W2085199105 workType "article" @default.