Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085219704> ?p ?o ?g. }
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- W2085219704 endingPage "868" @default.
- W2085219704 startingPage "865" @default.
- W2085219704 abstract "This paper gives some insights in the applications where PECVD nitrides can be introduced to replace the LPCVD layers and how the process parameters need to be varied to obtain the desired properties. Film properties like stress, hydrogen content, wet etch rate and deposition rate are reported. The nitrides are optimized for specific applications and examples on the influence of nitride properties on device performance are given. It is important to investigate that the advantage of the high film integrity of nitride layers used in the past is not lost due to the strong demand for developing new process schemes with low thermal budget layers. We show that PECVD films are a valid alternative for LPCVD and that the majority of the film properties satisfy the criteria to use PECVD films as contact-etch-stop layers, silicidation blocking films and spacer materials." @default.
- W2085219704 created "2016-06-24" @default.
- W2085219704 creator A5021583905 @default.
- W2085219704 creator A5029020443 @default.
- W2085219704 creator A5030622964 @default.
- W2085219704 creator A5037463600 @default.
- W2085219704 creator A5037538763 @default.
- W2085219704 creator A5042473394 @default.
- W2085219704 creator A5078141110 @default.
- W2085219704 creator A5083023348 @default.
- W2085219704 date "2005-05-01" @default.
- W2085219704 modified "2023-10-16" @default.
- W2085219704 title "Optimization of low temperature silicon nitride processes for improvement of device performance" @default.
- W2085219704 cites W2322659296 @default.
- W2085219704 doi "https://doi.org/10.1016/j.microrel.2004.10.028" @default.
- W2085219704 hasPublicationYear "2005" @default.
- W2085219704 type Work @default.
- W2085219704 sameAs 2085219704 @default.
- W2085219704 citedByCount "13" @default.
- W2085219704 countsByYear W20852197042013 @default.
- W2085219704 countsByYear W20852197042015 @default.
- W2085219704 countsByYear W20852197042018 @default.
- W2085219704 countsByYear W20852197042022 @default.
- W2085219704 crossrefType "journal-article" @default.
- W2085219704 hasAuthorship W2085219704A5021583905 @default.
- W2085219704 hasAuthorship W2085219704A5029020443 @default.
- W2085219704 hasAuthorship W2085219704A5030622964 @default.
- W2085219704 hasAuthorship W2085219704A5037463600 @default.
- W2085219704 hasAuthorship W2085219704A5037538763 @default.
- W2085219704 hasAuthorship W2085219704A5042473394 @default.
- W2085219704 hasAuthorship W2085219704A5078141110 @default.
- W2085219704 hasAuthorship W2085219704A5083023348 @default.
- W2085219704 hasConcept C171250308 @default.
- W2085219704 hasConcept C192562407 @default.
- W2085219704 hasConcept C194760766 @default.
- W2085219704 hasConcept C2777431650 @default.
- W2085219704 hasConcept C2779227376 @default.
- W2085219704 hasConcept C38347018 @default.
- W2085219704 hasConcept C49040817 @default.
- W2085219704 hasConcept C544956773 @default.
- W2085219704 hasConcept C57410435 @default.
- W2085219704 hasConceptScore W2085219704C171250308 @default.
- W2085219704 hasConceptScore W2085219704C192562407 @default.
- W2085219704 hasConceptScore W2085219704C194760766 @default.
- W2085219704 hasConceptScore W2085219704C2777431650 @default.
- W2085219704 hasConceptScore W2085219704C2779227376 @default.
- W2085219704 hasConceptScore W2085219704C38347018 @default.
- W2085219704 hasConceptScore W2085219704C49040817 @default.
- W2085219704 hasConceptScore W2085219704C544956773 @default.
- W2085219704 hasConceptScore W2085219704C57410435 @default.
- W2085219704 hasIssue "5-6" @default.
- W2085219704 hasLocation W20852197041 @default.
- W2085219704 hasOpenAccess W2085219704 @default.
- W2085219704 hasPrimaryLocation W20852197041 @default.
- W2085219704 hasRelatedWork W1995255610 @default.
- W2085219704 hasRelatedWork W2003673095 @default.
- W2085219704 hasRelatedWork W2010769555 @default.
- W2085219704 hasRelatedWork W2036418505 @default.
- W2085219704 hasRelatedWork W2042245115 @default.
- W2085219704 hasRelatedWork W2120835426 @default.
- W2085219704 hasRelatedWork W2511137766 @default.
- W2085219704 hasRelatedWork W2990243423 @default.
- W2085219704 hasRelatedWork W3005463873 @default.
- W2085219704 hasRelatedWork W4299356572 @default.
- W2085219704 hasVolume "45" @default.
- W2085219704 isParatext "false" @default.
- W2085219704 isRetracted "false" @default.
- W2085219704 magId "2085219704" @default.
- W2085219704 workType "article" @default.