FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085342203> ?p ?o ?g. }

• W2085342203 endingPage "G443" @default.
• W2085342203 startingPage "G443" @default.
• W2085342203 abstract "We have demonstrated a general process which could be used for the integration of lattice-mismatched semiconductors onto large, Si-sized wafers by wafer bonding virtual substrates. The challenges for implementing this procedure for large diameter Ge-on-insulator (GOI) have been identified and solved, resulting in the transfer of epitaxial to a Si wafer. We found that planarization of Ge virtual substrates was a key limiting factor in the transfer process. To circumvent this problem, an oxide layer was first deposited on the Ge film before planarization using a standard oxide chemical mechanical planarization process. The GOI structure was created using -induced layer exfoliation (Smartcut™) and a buried etch-stop layer, which was used to subsequently remove the surface damage with a hydrogen peroxide selective etch. After selective etching, the crosshatched surface morphology of the original virtual substrate was preserved with roughness of <15 nm rms as measured on a scale and a scale roughness of Using an etch-stop layer, the transferred device layer thickness is defined epitaxially allowing for future fabrication of ultrathin GOI as well as III-V films directly on large-diameter Si wafers. © 2004 The Electrochemical Society. All rights reserved." @default.
• W2085342203 created "2016-06-24" @default.
• W2085342203 creator A5005790097 @default.
• W2085342203 creator A5059808320 @default.
• W2085342203 creator A5081141038 @default.
• W2085342203 creator A5081622311 @default.
• W2085342203 creator A5084753761 @default.
• W2085342203 creator A5087643661 @default.
• W2085342203 date "2004-01-01" @default.
• W2085342203 modified "2023-10-18" @default.
• W2085342203 title "Coplanar Integration of Lattice-Mismatched Semiconductors with Silicon by Wafer Bonding Ge/Si[sub 1−x]Ge[sub x]/Si Virtual Substrates" @default.
• W2085342203 cites W1491933979 @default.
• W2085342203 cites W1556061936 @default.
• W2085342203 cites W1559058190 @default.
• W2085342203 cites W1565210720 @default.
• W2085342203 cites W1595101091 @default.
• W2085342203 cites W1969950458 @default.
• W2085342203 cites W1969995533 @default.
• W2085342203 cites W1973671776 @default.
• W2085342203 cites W1973789205 @default.
• W2085342203 cites W1977289217 @default.
• W2085342203 cites W1977761395 @default.
• W2085342203 cites W1983521334 @default.
• W2085342203 cites W1988437453 @default.
• W2085342203 cites W1994435865 @default.
• W2085342203 cites W1994948621 @default.
• W2085342203 cites W2003381457 @default.
• W2085342203 cites W2006465965 @default.
• W2085342203 cites W2017812921 @default.
• W2085342203 cites W2035346756 @default.
• W2085342203 cites W2040661770 @default.
• W2085342203 cites W2049911602 @default.
• W2085342203 cites W2056826659 @default.
• W2085342203 cites W2057875422 @default.
• W2085342203 cites W2069666884 @default.
• W2085342203 cites W2077417891 @default.
• W2085342203 cites W2078506594 @default.
• W2085342203 cites W2089909205 @default.
• W2085342203 cites W2090008536 @default.
• W2085342203 cites W2092739219 @default.
• W2085342203 cites W2104591946 @default.
• W2085342203 cites W2123607234 @default.
• W2085342203 cites W2124744101 @default.
• W2085342203 cites W2165529511 @default.
• W2085342203 doi "https://doi.org/10.1149/1.1757462" @default.
• W2085342203 hasPublicationYear "2004" @default.
• W2085342203 type Work @default.
• W2085342203 sameAs 2085342203 @default.
• W2085342203 citedByCount "30" @default.
• W2085342203 countsByYear W20853422032012 @default.
• W2085342203 countsByYear W20853422032013 @default.
• W2085342203 countsByYear W20853422032014 @default.
• W2085342203 countsByYear W20853422032015 @default.
• W2085342203 countsByYear W20853422032016 @default.
• W2085342203 countsByYear W20853422032018 @default.
• W2085342203 countsByYear W20853422032019 @default.
• W2085342203 countsByYear W20853422032022 @default.
• W2085342203 crossrefType "journal-article" @default.
• W2085342203 hasAuthorship W2085342203A5005790097 @default.
• W2085342203 hasAuthorship W2085342203A5059808320 @default.
• W2085342203 hasAuthorship W2085342203A5081141038 @default.
• W2085342203 hasAuthorship W2085342203A5081622311 @default.
• W2085342203 hasAuthorship W2085342203A5084753761 @default.
• W2085342203 hasAuthorship W2085342203A5087643661 @default.
• W2085342203 hasConcept C100460472 @default.
• W2085342203 hasConcept C107365816 @default.
• W2085342203 hasConcept C108225325 @default.
• W2085342203 hasConcept C110738630 @default.
• W2085342203 hasConcept C159985019 @default.
• W2085342203 hasConcept C160671074 @default.
• W2085342203 hasConcept C171250308 @default.
• W2085342203 hasConcept C180088628 @default.
• W2085342203 hasConcept C191897082 @default.
• W2085342203 hasConcept C192562407 @default.
• W2085342203 hasConcept C2779133538 @default.
• W2085342203 hasConcept C2779227376 @default.
• W2085342203 hasConcept C2779851234 @default.
• W2085342203 hasConcept C33574316 @default.
• W2085342203 hasConcept C49040817 @default.
• W2085342203 hasConcept C544956773 @default.
• W2085342203 hasConcept C71039073 @default.
• W2085342203 hasConceptScore W2085342203C100460472 @default.
• W2085342203 hasConceptScore W2085342203C107365816 @default.
• W2085342203 hasConceptScore W2085342203C108225325 @default.
• W2085342203 hasConceptScore W2085342203C110738630 @default.
• W2085342203 hasConceptScore W2085342203C159985019 @default.
• W2085342203 hasConceptScore W2085342203C160671074 @default.
• W2085342203 hasConceptScore W2085342203C171250308 @default.
• W2085342203 hasConceptScore W2085342203C180088628 @default.
• W2085342203 hasConceptScore W2085342203C191897082 @default.
• W2085342203 hasConceptScore W2085342203C192562407 @default.
• W2085342203 hasConceptScore W2085342203C2779133538 @default.
• W2085342203 hasConceptScore W2085342203C2779227376 @default.
• W2085342203 hasConceptScore W2085342203C2779851234 @default.
• W2085342203 hasConceptScore W2085342203C33574316 @default.
• W2085342203 hasConceptScore W2085342203C49040817 @default.
• W2085342203 hasConceptScore W2085342203C544956773 @default.
• W2085342203 hasConceptScore W2085342203C71039073 @default.

• next