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• W2085346077 abstract "Accurate simultaneous measurements on the topography and electrostatic force field of 500nm pitch interdigitated electrodes embedded in a thin SiO2 layer in a plane perpendicular to the orientation of the electrodes are shown for the first time. A static force distance curve (FDC) based method has been developed, which allows a lateral and vertical resolution of 25 and 2nm, respectively. The measured force field distribution remains stable as result of the well controlled fabrication procedure of Pt cantilever tips that allows thousands of FDC measurements. A numerical model is established as well which demonstrates good agreement with the experimental results." @default.
• W2085346077 created "2016-06-24" @default.
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• W2085346077 date "2008-02-11" @default.
• W2085346077 modified "2023-10-18" @default.
• W2085346077 title "Two-dimensional electrostatic force field measurements with simultaneous topography measurement on embedded interdigitated nanoelectrodes using a force distance curve based method" @default.
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• W2085346077 doi "https://doi.org/10.1063/1.2844882" @default.
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