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- W2085358680 abstract "Si-containing polymers, which act as RIE-resists by generating a passivating SiO2 film on the polymer surfaces, are applied in microlithographic processes. New Si-containing polymers, i.e., Si-containing polycarbonates and polyestercarbonates have been synthesized. Various contents of Si (up to 30 wt%) were incorporated into the polymers. Thin films (about 100 micrometers thick) of the polymers were prepared for ablation and microstructuring at 308 nm. With a pinhole mask and a lens, a 10 X 10 matrix of circular craters was created on the polymer films. The fluence and number of pulses were varied for each crater. Ablation parameters (alpha) eff (effective absorption coefficient) and Fth (threshold fluence) were determined for each polymer. Using a reflecting objective (Schwarzschild type), microstructures with a sub-micron resolution can be produced on the polymer films. The quality of the ablated structures was evaluated by scanning electron microscopy. The incorporation of Si into polymers does not affect the ablation behavior of the polymers. Si-containing polyestercarbonates exhibited good ablation behavior, while surface swelling (incubation) was observed for polycarbonates films. The results from this work includes that Si-containing polyestercarbonates are suitable for laser ablation and microstructuring.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2085358680 created "2016-06-24" @default.
- W2085358680 creator A5009017155 @default.
- W2085358680 creator A5037019336 @default.
- W2085358680 creator A5038246142 @default.
- W2085358680 creator A5057955878 @default.
- W2085358680 creator A5088666346 @default.
- W2085358680 creator A5089428394 @default.
- W2085358680 date "1999-09-20" @default.
- W2085358680 modified "2023-09-27" @default.
- W2085358680 title "<title>Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates</title>" @default.
- W2085358680 doi "https://doi.org/10.1117/12.364224" @default.
- W2085358680 hasPublicationYear "1999" @default.
- W2085358680 type Work @default.
- W2085358680 sameAs 2085358680 @default.
- W2085358680 citedByCount "0" @default.
- W2085358680 crossrefType "proceedings-article" @default.
- W2085358680 hasAuthorship W2085358680A5009017155 @default.
- W2085358680 hasAuthorship W2085358680A5037019336 @default.
- W2085358680 hasAuthorship W2085358680A5038246142 @default.
- W2085358680 hasAuthorship W2085358680A5057955878 @default.
- W2085358680 hasAuthorship W2085358680A5088666346 @default.
- W2085358680 hasAuthorship W2085358680A5089428394 @default.
- W2085358680 hasConcept C120665830 @default.
- W2085358680 hasConcept C121332964 @default.
- W2085358680 hasConcept C127413603 @default.
- W2085358680 hasConcept C146978453 @default.
- W2085358680 hasConcept C159985019 @default.
- W2085358680 hasConcept C171250308 @default.
- W2085358680 hasConcept C19067145 @default.
- W2085358680 hasConcept C192562407 @default.
- W2085358680 hasConcept C22078206 @default.
- W2085358680 hasConcept C26771246 @default.
- W2085358680 hasConcept C2778902805 @default.
- W2085358680 hasConcept C2779188808 @default.
- W2085358680 hasConcept C520434653 @default.
- W2085358680 hasConcept C521977710 @default.
- W2085358680 hasConceptScore W2085358680C120665830 @default.
- W2085358680 hasConceptScore W2085358680C121332964 @default.
- W2085358680 hasConceptScore W2085358680C127413603 @default.
- W2085358680 hasConceptScore W2085358680C146978453 @default.
- W2085358680 hasConceptScore W2085358680C159985019 @default.
- W2085358680 hasConceptScore W2085358680C171250308 @default.
- W2085358680 hasConceptScore W2085358680C19067145 @default.
- W2085358680 hasConceptScore W2085358680C192562407 @default.
- W2085358680 hasConceptScore W2085358680C22078206 @default.
- W2085358680 hasConceptScore W2085358680C26771246 @default.
- W2085358680 hasConceptScore W2085358680C2778902805 @default.
- W2085358680 hasConceptScore W2085358680C2779188808 @default.
- W2085358680 hasConceptScore W2085358680C520434653 @default.
- W2085358680 hasConceptScore W2085358680C521977710 @default.
- W2085358680 hasLocation W20853586801 @default.
- W2085358680 hasOpenAccess W2085358680 @default.
- W2085358680 hasPrimaryLocation W20853586801 @default.
- W2085358680 hasRelatedWork W1977296502 @default.
- W2085358680 hasRelatedWork W1977947015 @default.
- W2085358680 hasRelatedWork W1993328436 @default.
- W2085358680 hasRelatedWork W1998561542 @default.
- W2085358680 hasRelatedWork W2006390374 @default.
- W2085358680 hasRelatedWork W2007718047 @default.
- W2085358680 hasRelatedWork W2020405180 @default.
- W2085358680 hasRelatedWork W2023819729 @default.
- W2085358680 hasRelatedWork W2025048285 @default.
- W2085358680 hasRelatedWork W2033437414 @default.
- W2085358680 hasRelatedWork W2056222084 @default.
- W2085358680 hasRelatedWork W2077994589 @default.
- W2085358680 hasRelatedWork W2079606405 @default.
- W2085358680 hasRelatedWork W2086139248 @default.
- W2085358680 hasRelatedWork W2086415100 @default.
- W2085358680 hasRelatedWork W2093119509 @default.
- W2085358680 hasRelatedWork W2095434268 @default.
- W2085358680 hasRelatedWork W2124100630 @default.
- W2085358680 hasRelatedWork W2125752454 @default.
- W2085358680 hasRelatedWork W2139474823 @default.
- W2085358680 isParatext "false" @default.
- W2085358680 isRetracted "false" @default.
- W2085358680 magId "2085358680" @default.
- W2085358680 workType "article" @default.