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- W2085369874 abstract "The fabrication of refractive microlens by introducing the melting process with coding gray-tone mask is reported. The applied mask is obtained by the coding method, nonlinear effects in intensity distribution through the gray-tone mask have been taken into account to correct the mask design. A continuous relief is formed in photoresist after exposing, and then the excellent surface shape microlens can be gained by melting. The technical parameters of this process are also presented. Results are presented for experiments and evaluated by profile meter and scanning electronic microscope. The fabrication technology of refractive microlens by this process is simple and it indicates the enormous potential to extend the fabrication range ofrefractive microlens." @default.
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- W2085369874 date "1999-07-19" @default.
- W2085369874 modified "2023-09-27" @default.
- W2085369874 title "<title>Fabrication of refractive microlens with coding gray-tone mask</title>" @default.
- W2085369874 doi "https://doi.org/10.1117/12.354999" @default.
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