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- W2085403208 abstract "Cluster ion implantation using decaborane (B10H14) has been proposed as a shallow implantation technique for LSI devices with gate lengths of several-tens nanometers. Experiments and computer simulations of low-energy boron monomers and decaborane clusters implantation were performed. Molecular dynamics simulations of B10 cluster implantation have shown similar implant depth but different damage density and damage structure compared to monomer (B1) ion implantation with the same energy-per-atom. For monomer implantation, point-defects such as vacancy–interstitial pairs are mainly formed. On the other hand, B10 generates large numbers of defects within a highly-amorphised region at the impact location. This difference in damage structure produced during implantation is expected to cause different annihilation processes." @default.
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- W2085403208 date "2003-05-01" @default.
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- W2085403208 title "Defect characteristics by boron cluster ion implantation" @default.
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- W2085403208 doi "https://doi.org/10.1016/s0168-583x(03)00878-4" @default.
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