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- W2085429600 abstract "This study presents the design, fabrication and characterization of an ultra miniaturized 3-axis accelerometer with implanted piezoresistive sensing elements and read out circuits are having nano-scale dimensions. It has been developed using MEMS/NEMS machining and fabrication techniques. This sensor consists of a new sub-millimeter structure with seismic mass and combined cross-beam and surrounding beams. It can detect three components of linear acceleration simultaneously. The sensitivity could be enhanced significantly while miniaturizing the die size of sensor chip with aid of novel structure and nanoscale piezoresistors on the sensing beams. Therefore, this novel proposed sensor is showing good performance and smaller than other comparable miniaturized sensor structures reported thus far. The accelerometer is capable of measuring accelerations up to ±20 g in the frequency bandwidth of 480 Hz. Comparison of the obtained experimental results and finite element simulation shows good agreement. This accelerometer is being introduced for a wearable physical activity monitoring systems." @default.
- W2085429600 created "2016-06-24" @default.
- W2085429600 creator A5011618114 @default.
- W2085429600 creator A5064713378 @default.
- W2085429600 creator A5079910857 @default.
- W2085429600 date "2009-11-01" @default.
- W2085429600 modified "2023-09-27" @default.
- W2085429600 title "Ultra miniature µ-accelerometer for wearable physical activity monitoring systems" @default.
- W2085429600 cites W1481014339 @default.
- W2085429600 cites W1966720158 @default.
- W2085429600 cites W1977066246 @default.
- W2085429600 cites W2012422791 @default.
- W2085429600 cites W2043942222 @default.
- W2085429600 cites W2083484092 @default.
- W2085429600 cites W2135548315 @default.
- W2085429600 doi "https://doi.org/10.1109/mhs.2009.5351973" @default.
- W2085429600 hasPublicationYear "2009" @default.
- W2085429600 type Work @default.
- W2085429600 sameAs 2085429600 @default.
- W2085429600 citedByCount "0" @default.
- W2085429600 crossrefType "proceedings-article" @default.
- W2085429600 hasAuthorship W2085429600A5011618114 @default.
- W2085429600 hasAuthorship W2085429600A5064713378 @default.
- W2085429600 hasAuthorship W2085429600A5079910857 @default.
- W2085429600 hasConcept C111919701 @default.
- W2085429600 hasConcept C117896860 @default.
- W2085429600 hasConcept C119599485 @default.
- W2085429600 hasConcept C121332964 @default.
- W2085429600 hasConcept C127413603 @default.
- W2085429600 hasConcept C134146338 @default.
- W2085429600 hasConcept C136525101 @default.
- W2085429600 hasConcept C142724271 @default.
- W2085429600 hasConcept C145667562 @default.
- W2085429600 hasConcept C149635348 @default.
- W2085429600 hasConcept C150594956 @default.
- W2085429600 hasConcept C15083742 @default.
- W2085429600 hasConcept C155672457 @default.
- W2085429600 hasConcept C171250308 @default.
- W2085429600 hasConcept C173409883 @default.
- W2085429600 hasConcept C192562407 @default.
- W2085429600 hasConcept C198490522 @default.
- W2085429600 hasConcept C204787440 @default.
- W2085429600 hasConcept C21200559 @default.
- W2085429600 hasConcept C24326235 @default.
- W2085429600 hasConcept C24890656 @default.
- W2085429600 hasConcept C2776257435 @default.
- W2085429600 hasConcept C37977207 @default.
- W2085429600 hasConcept C41008148 @default.
- W2085429600 hasConcept C49040817 @default.
- W2085429600 hasConcept C71924100 @default.
- W2085429600 hasConcept C74650414 @default.
- W2085429600 hasConcept C76155785 @default.
- W2085429600 hasConcept C89805583 @default.
- W2085429600 hasConceptScore W2085429600C111919701 @default.
- W2085429600 hasConceptScore W2085429600C117896860 @default.
- W2085429600 hasConceptScore W2085429600C119599485 @default.
- W2085429600 hasConceptScore W2085429600C121332964 @default.
- W2085429600 hasConceptScore W2085429600C127413603 @default.
- W2085429600 hasConceptScore W2085429600C134146338 @default.
- W2085429600 hasConceptScore W2085429600C136525101 @default.
- W2085429600 hasConceptScore W2085429600C142724271 @default.
- W2085429600 hasConceptScore W2085429600C145667562 @default.
- W2085429600 hasConceptScore W2085429600C149635348 @default.
- W2085429600 hasConceptScore W2085429600C150594956 @default.
- W2085429600 hasConceptScore W2085429600C15083742 @default.
- W2085429600 hasConceptScore W2085429600C155672457 @default.
- W2085429600 hasConceptScore W2085429600C171250308 @default.
- W2085429600 hasConceptScore W2085429600C173409883 @default.
- W2085429600 hasConceptScore W2085429600C192562407 @default.
- W2085429600 hasConceptScore W2085429600C198490522 @default.
- W2085429600 hasConceptScore W2085429600C204787440 @default.
- W2085429600 hasConceptScore W2085429600C21200559 @default.
- W2085429600 hasConceptScore W2085429600C24326235 @default.
- W2085429600 hasConceptScore W2085429600C24890656 @default.
- W2085429600 hasConceptScore W2085429600C2776257435 @default.
- W2085429600 hasConceptScore W2085429600C37977207 @default.
- W2085429600 hasConceptScore W2085429600C41008148 @default.
- W2085429600 hasConceptScore W2085429600C49040817 @default.
- W2085429600 hasConceptScore W2085429600C71924100 @default.
- W2085429600 hasConceptScore W2085429600C74650414 @default.
- W2085429600 hasConceptScore W2085429600C76155785 @default.
- W2085429600 hasConceptScore W2085429600C89805583 @default.
- W2085429600 hasLocation W20854296001 @default.
- W2085429600 hasOpenAccess W2085429600 @default.
- W2085429600 hasPrimaryLocation W20854296001 @default.
- W2085429600 hasRelatedWork W1981205801 @default.
- W2085429600 hasRelatedWork W2004882382 @default.
- W2085429600 hasRelatedWork W2013357772 @default.
- W2085429600 hasRelatedWork W2030166701 @default.
- W2085429600 hasRelatedWork W2081873083 @default.
- W2085429600 hasRelatedWork W2085429600 @default.
- W2085429600 hasRelatedWork W2169126081 @default.
- W2085429600 hasRelatedWork W2520125024 @default.
- W2085429600 hasRelatedWork W3015417941 @default.
- W2085429600 hasRelatedWork W2157737606 @default.
- W2085429600 isParatext "false" @default.
- W2085429600 isRetracted "false" @default.
- W2085429600 magId "2085429600" @default.
- W2085429600 workType "article" @default.