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• W2085444711 endingPage "9098" @default.
• W2085444711 startingPage "9095" @default.
• W2085444711 abstract "Thin films of ZrO2 have been deposited by liquid injection MOCVD and ALD using the cyclopentadienyl-based Zr precursors [(MeCp)2ZrMe(OMe)] and [(MeCp)2ZrMe(OBut)]. Analysis by X-ray diffraction showed that films grown at low temperature (300 °C) by ALD were amorphous, whist films deposited at higher temperature (600 °C) by MOCVD exist in the tetragonal phase. Auger electron spectroscopy showed that residual carbon (1.4–7.0 at.%) was present in the oxide films and that the MOCVD-grown films contained more carbon contamination than those grown by ALD." @default.
• W2085444711 created "2016-06-24" @default.
• W2085444711 creator A5015486428 @default.
• W2085444711 creator A5020916055 @default.
• W2085444711 creator A5034798093 @default.
• W2085444711 creator A5043597538 @default.
• W2085444711 creator A5053803952 @default.
• W2085444711 creator A5055415882 @default.
• W2085444711 creator A5063285061 @default.
• W2085444711 creator A5084725782 @default.
• W2085444711 date "2007-09-01" @default.
• W2085444711 modified "2023-09-23" @default.
• W2085444711 title "Liquid injection MOCVD and ALD of ZrO2 using Zr–cyclopentadienyl precursors" @default.
• W2085444711 cites W1990635462 @default.
• W2085444711 cites W1990847672 @default.
• W2085444711 cites W1993207854 @default.
• W2085444711 cites W1995093167 @default.
• W2085444711 cites W1995625631 @default.
• W2085444711 cites W1997921153 @default.
• W2085444711 cites W2003645630 @default.
• W2085444711 cites W2005624305 @default.
• W2085444711 cites W2009784477 @default.
• W2085444711 cites W2015320418 @default.
• W2085444711 cites W2016144889 @default.
• W2085444711 cites W2022652848 @default.
• W2085444711 cites W2028251226 @default.
• W2085444711 cites W2041246757 @default.
• W2085444711 cites W2046437806 @default.
• W2085444711 cites W2050286473 @default.
• W2085444711 cites W2050435835 @default.
• W2085444711 cites W2057050065 @default.
• W2085444711 cites W2073781642 @default.
• W2085444711 cites W2074675946 @default.
• W2085444711 cites W2091718134 @default.
• W2085444711 cites W2099482257 @default.
• W2085444711 cites W2104245173 @default.
• W2085444711 cites W2118486175 @default.
• W2085444711 cites W2124575012 @default.
• W2085444711 cites W2151855530 @default.
• W2085444711 cites W2153691750 @default.
• W2085444711 cites W4254055163 @default.
• W2085444711 doi "https://doi.org/10.1016/j.surfcoat.2007.04.098" @default.
• W2085444711 hasPublicationYear "2007" @default.
• W2085444711 type Work @default.
• W2085444711 sameAs 2085444711 @default.
• W2085444711 citedByCount "17" @default.
• W2085444711 countsByYear W20854447112012 @default.
• W2085444711 countsByYear W20854447112013 @default.
• W2085444711 countsByYear W20854447112014 @default.
• W2085444711 countsByYear W20854447112015 @default.
• W2085444711 countsByYear W20854447112016 @default.
• W2085444711 countsByYear W20854447112018 @default.
• W2085444711 countsByYear W20854447112020 @default.
• W2085444711 crossrefType "journal-article" @default.
• W2085444711 hasAuthorship W2085444711A5015486428 @default.
• W2085444711 hasAuthorship W2085444711A5020916055 @default.
• W2085444711 hasAuthorship W2085444711A5034798093 @default.
• W2085444711 hasAuthorship W2085444711A5043597538 @default.
• W2085444711 hasAuthorship W2085444711A5053803952 @default.
• W2085444711 hasAuthorship W2085444711A5055415882 @default.
• W2085444711 hasAuthorship W2085444711A5063285061 @default.
• W2085444711 hasAuthorship W2085444711A5084725782 @default.
• W2085444711 hasConcept C104779481 @default.
• W2085444711 hasConcept C110738630 @default.
• W2085444711 hasConcept C113196181 @default.
• W2085444711 hasConcept C121332964 @default.
• W2085444711 hasConcept C140205800 @default.
• W2085444711 hasConcept C159985019 @default.
• W2085444711 hasConcept C161790260 @default.
• W2085444711 hasConcept C170751736 @default.
• W2085444711 hasConcept C171250308 @default.
• W2085444711 hasConcept C175665537 @default.
• W2085444711 hasConcept C178790620 @default.
• W2085444711 hasConcept C181458950 @default.
• W2085444711 hasConcept C185544564 @default.
• W2085444711 hasConcept C185592680 @default.
• W2085444711 hasConcept C19067145 @default.
• W2085444711 hasConcept C192562407 @default.
• W2085444711 hasConcept C25442681 @default.
• W2085444711 hasConcept C2779227376 @default.
• W2085444711 hasConcept C44280652 @default.
• W2085444711 hasConcept C56052488 @default.
• W2085444711 hasConcept C8010536 @default.
• W2085444711 hasConceptScore W2085444711C104779481 @default.
• W2085444711 hasConceptScore W2085444711C110738630 @default.
• W2085444711 hasConceptScore W2085444711C113196181 @default.
• W2085444711 hasConceptScore W2085444711C121332964 @default.
• W2085444711 hasConceptScore W2085444711C140205800 @default.
• W2085444711 hasConceptScore W2085444711C159985019 @default.
• W2085444711 hasConceptScore W2085444711C161790260 @default.
• W2085444711 hasConceptScore W2085444711C170751736 @default.
• W2085444711 hasConceptScore W2085444711C171250308 @default.
• W2085444711 hasConceptScore W2085444711C175665537 @default.
• W2085444711 hasConceptScore W2085444711C178790620 @default.
• W2085444711 hasConceptScore W2085444711C181458950 @default.
• W2085444711 hasConceptScore W2085444711C185544564 @default.
• W2085444711 hasConceptScore W2085444711C185592680 @default.
• W2085444711 hasConceptScore W2085444711C19067145 @default.

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