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• W2085449120 abstract "Femtosecond (fs) laser becomes more popular in precise material procesing due to the limited heat affected zone (HAZ) over longer laser pulses. In this paper, micro-hole drilling in ambient air with fs fiber laser at 1030 nm is presented. Micro holes were fabricated in both transparent (polymer and glass), and non-transparent materials (metal and tissue). A scanning electron microscopy is used to investigate the hole quality. Both percusiion drilling and trepanning drilling methods were evaluated and compared. High quality micro holes with no visible micro-cracks were demonstrated. Micro-hole drilling in hard and soft tissues with no collateral thermal damage is observed. This study can be extended to MEMS, microfluidic, and micro surgery applications." @default.
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• W2085449120 date "2013-03-13" @default.
• W2085449120 modified "2023-09-27" @default.
• W2085449120 title "Micro-hole drilling with femtosecond fiber laser" @default.
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• W2085449120 doi "https://doi.org/10.1117/12.2004888" @default.
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