Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085488085> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2085488085 endingPage "L1247" @default.
- W2085488085 startingPage "L1247" @default.
- W2085488085 abstract "Nanoprotuberances and grooves were fabricated on a silicon surface by approximately 100-nm-radius diamond tip sliding using an atomic force microscope in atmosphere. To clarify the mechanical and chemical properties of these processed parts, changes in the protuberance and groove profiles due to additional diamond tip sliding and potassium hydroxide (KOH) solution etching were evaluated. Processed protuberances were negligibly removed, and processed grooves were easily removed by additional diamond tip sliding. The KOH solution selectively etched the unprocessed silicon area, while the protuberances, grooves and flat surfaces processed by diamond tip sliding were negligibly etched. Three-dimensional nanofabrication is performed in this study by utilizing these mechanochemically processed parts as a protective etching mask." @default.
- W2085488085 created "2016-06-24" @default.
- W2085488085 creator A5031177622 @default.
- W2085488085 creator A5064695514 @default.
- W2085488085 date "2001-11-01" @default.
- W2085488085 modified "2023-09-25" @default.
- W2085488085 title "Fabrication of Silicon Utilizing Mechanochemical Local Oxidation by Diamond Tip Sliding" @default.
- W2085488085 cites W1965702561 @default.
- W2085488085 cites W1966947382 @default.
- W2085488085 cites W1970588492 @default.
- W2085488085 cites W1986880960 @default.
- W2085488085 cites W2002704502 @default.
- W2085488085 cites W2022162151 @default.
- W2085488085 cites W2040113820 @default.
- W2085488085 cites W2075315245 @default.
- W2085488085 doi "https://doi.org/10.1143/jjap.40.l1247" @default.
- W2085488085 hasPublicationYear "2001" @default.
- W2085488085 type Work @default.
- W2085488085 sameAs 2085488085 @default.
- W2085488085 citedByCount "20" @default.
- W2085488085 countsByYear W20854880852014 @default.
- W2085488085 countsByYear W20854880852018 @default.
- W2085488085 countsByYear W20854880852020 @default.
- W2085488085 countsByYear W20854880852021 @default.
- W2085488085 countsByYear W20854880852022 @default.
- W2085488085 crossrefType "journal-article" @default.
- W2085488085 hasAuthorship W2085488085A5031177622 @default.
- W2085488085 hasAuthorship W2085488085A5064695514 @default.
- W2085488085 hasConcept C100460472 @default.
- W2085488085 hasConcept C127413603 @default.
- W2085488085 hasConcept C136525101 @default.
- W2085488085 hasConcept C142724271 @default.
- W2085488085 hasConcept C159985019 @default.
- W2085488085 hasConcept C162117346 @default.
- W2085488085 hasConcept C171250308 @default.
- W2085488085 hasConcept C191897082 @default.
- W2085488085 hasConcept C192562407 @default.
- W2085488085 hasConcept C204787440 @default.
- W2085488085 hasConcept C2776074547 @default.
- W2085488085 hasConcept C2776921476 @default.
- W2085488085 hasConcept C2778827957 @default.
- W2085488085 hasConcept C2779227376 @default.
- W2085488085 hasConcept C2779439175 @default.
- W2085488085 hasConcept C2779472054 @default.
- W2085488085 hasConcept C33220542 @default.
- W2085488085 hasConcept C42360764 @default.
- W2085488085 hasConcept C49040817 @default.
- W2085488085 hasConcept C544956773 @default.
- W2085488085 hasConcept C71924100 @default.
- W2085488085 hasConceptScore W2085488085C100460472 @default.
- W2085488085 hasConceptScore W2085488085C127413603 @default.
- W2085488085 hasConceptScore W2085488085C136525101 @default.
- W2085488085 hasConceptScore W2085488085C142724271 @default.
- W2085488085 hasConceptScore W2085488085C159985019 @default.
- W2085488085 hasConceptScore W2085488085C162117346 @default.
- W2085488085 hasConceptScore W2085488085C171250308 @default.
- W2085488085 hasConceptScore W2085488085C191897082 @default.
- W2085488085 hasConceptScore W2085488085C192562407 @default.
- W2085488085 hasConceptScore W2085488085C204787440 @default.
- W2085488085 hasConceptScore W2085488085C2776074547 @default.
- W2085488085 hasConceptScore W2085488085C2776921476 @default.
- W2085488085 hasConceptScore W2085488085C2778827957 @default.
- W2085488085 hasConceptScore W2085488085C2779227376 @default.
- W2085488085 hasConceptScore W2085488085C2779439175 @default.
- W2085488085 hasConceptScore W2085488085C2779472054 @default.
- W2085488085 hasConceptScore W2085488085C33220542 @default.
- W2085488085 hasConceptScore W2085488085C42360764 @default.
- W2085488085 hasConceptScore W2085488085C49040817 @default.
- W2085488085 hasConceptScore W2085488085C544956773 @default.
- W2085488085 hasConceptScore W2085488085C71924100 @default.
- W2085488085 hasIssue "11B" @default.
- W2085488085 hasLocation W20854880851 @default.
- W2085488085 hasOpenAccess W2085488085 @default.
- W2085488085 hasPrimaryLocation W20854880851 @default.
- W2085488085 hasRelatedWork W1937547280 @default.
- W2085488085 hasRelatedWork W1979069790 @default.
- W2085488085 hasRelatedWork W1989365707 @default.
- W2085488085 hasRelatedWork W2000975590 @default.
- W2085488085 hasRelatedWork W2085488085 @default.
- W2085488085 hasRelatedWork W2275893111 @default.
- W2085488085 hasRelatedWork W2319451006 @default.
- W2085488085 hasRelatedWork W2322197603 @default.
- W2085488085 hasRelatedWork W1970865607 @default.
- W2085488085 hasRelatedWork W2016338060 @default.
- W2085488085 hasVolume "40" @default.
- W2085488085 isParatext "false" @default.
- W2085488085 isRetracted "false" @default.
- W2085488085 magId "2085488085" @default.
- W2085488085 workType "article" @default.