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- W2085495789 abstract "A review of key developments in the field of inorganic resist systems is presented. We also discuss the role that inorganic resist systems can play in submicron optical lithography for VLSI. Because of a unique set of material characteristics, the optical lithographic performance of these resist systems surpasses that of any known organic resist system, and even exceeds that expected for a resist having infinite contrast. Effects such as edge sharpening and photobleaching compensate for the resolution-limiting diffraction effects in optical lithography. We discuss a two-stage imaging mechanism, consisting of the definition of a thin image layer followed by anisotropic, wet chemical etching to replicate this high resolution image into the entire thickness of the Ge-Se film. The high absorbance of these films to the exposing radiation eliminates problems associated with substrate reflectivity and their resistance to oxygen plasma allows the use of a bi-level scheme that alleviates problems associated with device topography. Sensitivity of this resist system to the entire UV spectrum permits the use of a single resist system for all current and future optical exposure tools." @default.
- W2085495789 created "2016-06-24" @default.
- W2085495789 creator A5031937290 @default.
- W2085495789 creator A5039346567 @default.
- W2085495789 creator A5044415966 @default.
- W2085495789 creator A5066658161 @default.
- W2085495789 date "1983-11-07" @default.
- W2085495789 modified "2023-09-25" @default.
- W2085495789 title "<title>Germanium-Selenium (Ge-Se) Based Resist Systems For Submicron VLSI Application</title>" @default.
- W2085495789 doi "https://doi.org/10.1117/12.935120" @default.
- W2085495789 hasPublicationYear "1983" @default.
- W2085495789 type Work @default.
- W2085495789 sameAs 2085495789 @default.
- W2085495789 citedByCount "3" @default.
- W2085495789 countsByYear W20854957892014 @default.
- W2085495789 crossrefType "proceedings-article" @default.
- W2085495789 hasAuthorship W2085495789A5031937290 @default.
- W2085495789 hasAuthorship W2085495789A5039346567 @default.
- W2085495789 hasAuthorship W2085495789A5044415966 @default.
- W2085495789 hasAuthorship W2085495789A5066658161 @default.
- W2085495789 hasConcept C100460472 @default.
- W2085495789 hasConcept C105487726 @default.
- W2085495789 hasConcept C120665830 @default.
- W2085495789 hasConcept C121332964 @default.
- W2085495789 hasConcept C134406635 @default.
- W2085495789 hasConcept C171250308 @default.
- W2085495789 hasConcept C192562407 @default.
- W2085495789 hasConcept C204223013 @default.
- W2085495789 hasConcept C2779227376 @default.
- W2085495789 hasConcept C49040817 @default.
- W2085495789 hasConcept C53524968 @default.
- W2085495789 hasConceptScore W2085495789C100460472 @default.
- W2085495789 hasConceptScore W2085495789C105487726 @default.
- W2085495789 hasConceptScore W2085495789C120665830 @default.
- W2085495789 hasConceptScore W2085495789C121332964 @default.
- W2085495789 hasConceptScore W2085495789C134406635 @default.
- W2085495789 hasConceptScore W2085495789C171250308 @default.
- W2085495789 hasConceptScore W2085495789C192562407 @default.
- W2085495789 hasConceptScore W2085495789C204223013 @default.
- W2085495789 hasConceptScore W2085495789C2779227376 @default.
- W2085495789 hasConceptScore W2085495789C49040817 @default.
- W2085495789 hasConceptScore W2085495789C53524968 @default.
- W2085495789 hasLocation W20854957891 @default.
- W2085495789 hasOpenAccess W2085495789 @default.
- W2085495789 hasPrimaryLocation W20854957891 @default.
- W2085495789 hasRelatedWork W1538884143 @default.
- W2085495789 hasRelatedWork W2021685851 @default.
- W2085495789 hasRelatedWork W2038630043 @default.
- W2085495789 hasRelatedWork W2062563703 @default.
- W2085495789 hasRelatedWork W2066278812 @default.
- W2085495789 hasRelatedWork W2084216123 @default.
- W2085495789 hasRelatedWork W2084412560 @default.
- W2085495789 hasRelatedWork W2099612599 @default.
- W2085495789 hasRelatedWork W2379221362 @default.
- W2085495789 hasRelatedWork W2751294986 @default.
- W2085495789 isParatext "false" @default.
- W2085495789 isRetracted "false" @default.
- W2085495789 magId "2085495789" @default.
- W2085495789 workType "article" @default.