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• W2085653679 endingPage "075603" @default.
• W2085653679 startingPage "075603" @default.
• W2085653679 abstract "We detail the monitoring of amorphous carbon deposition during thermal chemical vapour deposition of carbon nanotubes and propose a contamination-less process to integrate high-quality single-walled carbon nanotubes into micro-electromechanical systems. The amorphous content is evaluated by confocal micro-Raman spectroscopy and by scanning/transmission electron microscopy. We show how properly chosen process parameters can lead to successful integration of single-walled nanotubes, enabling nano-electromechanical system synthesis." @default.
• W2085653679 created "2016-06-24" @default.
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• W2085653679 date "2007-01-12" @default.
• W2085653679 modified "2023-10-16" @default.
• W2085653679 title "Amorphous carbon contamination monitoring and process optimization for single-walled carbon nanotube integration" @default.
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• W2085653679 doi "https://doi.org/10.1088/0957-4484/18/7/075603" @default.
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• W2085653679 hasPublicationYear "2007" @default.
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