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• W2085702961 abstract "It has been recently shown that the inhomogeneity of a multilayer structure leads to increase of sharpness of diffusion-junction rectifiers (see, for example, Pankratov 2005 Phys. Rev. B 72 075201; Pankratov and Spagnolo 2005 Eur. Phys. J. B 46 15) and implanted-junction rectifiers (see, for example, Pankratov 2008 Phys. Lett. A 372 1897), which were formed in the multilayer structure. It has also been shown that together with the increase of the sharpness, the homogeneity of the impurity distribution in the doped area increases. In this paper, both the effects (increase of sharpness of p–n junction and increase of homogeneity of impurity distribution together) have been used for the production of a system of p–n junctions (such as a bipolar transistor). The annealing time has been optimized for increasing simultaneously the sharpness and the homogeneity." @default.
• W2085702961 created "2016-06-24" @default.
• W2085702961 creator A5043103857 @default.
• W2085702961 date "2008-08-04" @default.
• W2085702961 modified "2023-09-25" @default.
• W2085702961 title "Redistribution of infused and implanted dopants in a multilayer structure during annealing of dopant and radiation defects for the production of a system of p–n junctions" @default.
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• W2085702961 doi "https://doi.org/10.1088/0268-1242/23/9/095005" @default.
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