Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085752812> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2085752812 endingPage "952" @default.
- W2085752812 startingPage "949" @default.
- W2085752812 abstract "This paper investigates the frequency tuning effects in a MEMS resonator that employs a simple crossbar heater integral to the devices as opposed to more complex serpentine heater designs. We report tuning of up to 1.1% from an unturned frequency of 39.2 kHz with 50mW power. By utilizing comb drives instead of parallel plate transducers, frequency tuning is controlled solely using joule heating through the crossbar while electrostatic spring tuning is negligible in comparison. The frequency shifts follow a power square law at lower currents but shown to deviate towards a higher order characteristic when the power exceeds 33mW." @default.
- W2085752812 created "2016-06-24" @default.
- W2085752812 creator A5002339242 @default.
- W2085752812 creator A5040386404 @default.
- W2085752812 date "2012-01-01" @default.
- W2085752812 modified "2023-10-18" @default.
- W2085752812 title "Frequency Tuning in a MEMS Resonator via an Integral Crossbar Heater" @default.
- W2085752812 cites W2114008742 @default.
- W2085752812 cites W2130512184 @default.
- W2085752812 cites W2154793390 @default.
- W2085752812 doi "https://doi.org/10.1016/j.proeng.2012.09.303" @default.
- W2085752812 hasPublicationYear "2012" @default.
- W2085752812 type Work @default.
- W2085752812 sameAs 2085752812 @default.
- W2085752812 citedByCount "2" @default.
- W2085752812 countsByYear W20857528122016 @default.
- W2085752812 crossrefType "journal-article" @default.
- W2085752812 hasAuthorship W2085752812A5002339242 @default.
- W2085752812 hasAuthorship W2085752812A5040386404 @default.
- W2085752812 hasBestOaLocation W20857528121 @default.
- W2085752812 hasConcept C117926987 @default.
- W2085752812 hasConcept C119599485 @default.
- W2085752812 hasConcept C121332964 @default.
- W2085752812 hasConcept C127413603 @default.
- W2085752812 hasConcept C163258240 @default.
- W2085752812 hasConcept C192562407 @default.
- W2085752812 hasConcept C24326235 @default.
- W2085752812 hasConcept C24890656 @default.
- W2085752812 hasConcept C2779058145 @default.
- W2085752812 hasConcept C29984679 @default.
- W2085752812 hasConcept C37977207 @default.
- W2085752812 hasConcept C49040817 @default.
- W2085752812 hasConcept C56318395 @default.
- W2085752812 hasConcept C62520636 @default.
- W2085752812 hasConcept C97126364 @default.
- W2085752812 hasConceptScore W2085752812C117926987 @default.
- W2085752812 hasConceptScore W2085752812C119599485 @default.
- W2085752812 hasConceptScore W2085752812C121332964 @default.
- W2085752812 hasConceptScore W2085752812C127413603 @default.
- W2085752812 hasConceptScore W2085752812C163258240 @default.
- W2085752812 hasConceptScore W2085752812C192562407 @default.
- W2085752812 hasConceptScore W2085752812C24326235 @default.
- W2085752812 hasConceptScore W2085752812C24890656 @default.
- W2085752812 hasConceptScore W2085752812C2779058145 @default.
- W2085752812 hasConceptScore W2085752812C29984679 @default.
- W2085752812 hasConceptScore W2085752812C37977207 @default.
- W2085752812 hasConceptScore W2085752812C49040817 @default.
- W2085752812 hasConceptScore W2085752812C56318395 @default.
- W2085752812 hasConceptScore W2085752812C62520636 @default.
- W2085752812 hasConceptScore W2085752812C97126364 @default.
- W2085752812 hasLocation W20857528121 @default.
- W2085752812 hasOpenAccess W2085752812 @default.
- W2085752812 hasPrimaryLocation W20857528121 @default.
- W2085752812 hasRelatedWork W1594169189 @default.
- W2085752812 hasRelatedWork W1997689149 @default.
- W2085752812 hasRelatedWork W2079294927 @default.
- W2085752812 hasRelatedWork W2083706270 @default.
- W2085752812 hasRelatedWork W2085752812 @default.
- W2085752812 hasRelatedWork W2093000825 @default.
- W2085752812 hasRelatedWork W2098678104 @default.
- W2085752812 hasRelatedWork W2131533361 @default.
- W2085752812 hasRelatedWork W2188988415 @default.
- W2085752812 hasRelatedWork W2898370741 @default.
- W2085752812 hasVolume "47" @default.
- W2085752812 isParatext "false" @default.
- W2085752812 isRetracted "false" @default.
- W2085752812 magId "2085752812" @default.
- W2085752812 workType "article" @default.