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- W2085754630 abstract "PVD ways of synthesis of hydrogen-free diamond-like films with high speed of a deposition of particles are analyzed. The technique of obtaining of coatings by means of a vacuum - arc discharge and of a plasma-optical filter provide the highest characteristics of -C amorphous diamond. However, the given way of synthesis is unwieldy and requires considerable costs. The capability of creation of the reactor of carbonic plasma in discharge with electron-beam heating of the cathode is consider. The control of power, entered into the graphitic cathode, allows essentially to limit a dispersion of an evaporated material." @default.
- W2085754630 created "2016-06-24" @default.
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- W2085754630 date "2003-09-30" @default.
- W2085754630 modified "2023-09-26" @default.
- W2085754630 title "<title>Deposition of carbonic films from plasma of arc discharge without a cathode spot</title>" @default.
- W2085754630 doi "https://doi.org/10.1117/12.517370" @default.
- W2085754630 hasPublicationYear "2003" @default.
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