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- W2085803429 abstract "In order to decrease the optical path length of an optoelectronic module, two ways of achieving silicon mirrors with trenches defining the mirror size are presented: dicing, and dry etching. The dicing was performed with a Disco DAD 361 dicing machine. To define the dry etched trench UV-lithography on electrodeposited resist was used. The electrodeposition was performed using commercially available positive photoresist PEPR 2400 from Shipley Ltd." @default.
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- W2085803429 date "1999-01-01" @default.
- W2085803429 modified "2023-09-25" @default.
- W2085803429 title "Decreasing the optical path length in an optoelectronic module using silicon micromachining" @default.
- W2085803429 cites W2139788711 @default.
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- W2085803429 doi "https://doi.org/10.1088/0960-1317/9/2/006" @default.
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