Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085863146> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2085863146 endingPage "694" @default.
- W2085863146 startingPage "694" @default.
- W2085863146 abstract "Rapid thermal oxidation of silicon has been carried out in the temperature range 1000 to 1250°C for an oxidation time of 5 to 60 s. The new kinetics data show that oxidation is carried out by a two-energy activation process. Assuming linear growth during the first 5 s of fast oxidation, the first process occurs with an activation energy Ea of 0.9 eV. The second process takes place with Ea = 1.4 eV for linear growth kinetics from 5 to 60 s." @default.
- W2085863146 created "2016-06-24" @default.
- W2085863146 creator A5015018536 @default.
- W2085863146 creator A5050489612 @default.
- W2085863146 date "1986-01-01" @default.
- W2085863146 modified "2023-09-25" @default.
- W2085863146 title "Rapid thermal oxidation of silicon for thin gate dielectric" @default.
- W2085863146 doi "https://doi.org/10.1049/el:19860475" @default.
- W2085863146 hasPublicationYear "1986" @default.
- W2085863146 type Work @default.
- W2085863146 sameAs 2085863146 @default.
- W2085863146 citedByCount "12" @default.
- W2085863146 countsByYear W20858631462021 @default.
- W2085863146 crossrefType "journal-article" @default.
- W2085863146 hasAuthorship W2085863146A5015018536 @default.
- W2085863146 hasAuthorship W2085863146A5050489612 @default.
- W2085863146 hasConcept C111919701 @default.
- W2085863146 hasConcept C121332964 @default.
- W2085863146 hasConcept C127413603 @default.
- W2085863146 hasConcept C133386390 @default.
- W2085863146 hasConcept C147789679 @default.
- W2085863146 hasConcept C148898269 @default.
- W2085863146 hasConcept C159985019 @default.
- W2085863146 hasConcept C185592680 @default.
- W2085863146 hasConcept C186370098 @default.
- W2085863146 hasConcept C192562407 @default.
- W2085863146 hasConcept C204323151 @default.
- W2085863146 hasConcept C204530211 @default.
- W2085863146 hasConcept C2779281663 @default.
- W2085863146 hasConcept C2993759403 @default.
- W2085863146 hasConcept C39353612 @default.
- W2085863146 hasConcept C41008148 @default.
- W2085863146 hasConcept C42360764 @default.
- W2085863146 hasConcept C49040817 @default.
- W2085863146 hasConcept C544956773 @default.
- W2085863146 hasConcept C62520636 @default.
- W2085863146 hasConcept C95121573 @default.
- W2085863146 hasConcept C97355855 @default.
- W2085863146 hasConcept C98045186 @default.
- W2085863146 hasConceptScore W2085863146C111919701 @default.
- W2085863146 hasConceptScore W2085863146C121332964 @default.
- W2085863146 hasConceptScore W2085863146C127413603 @default.
- W2085863146 hasConceptScore W2085863146C133386390 @default.
- W2085863146 hasConceptScore W2085863146C147789679 @default.
- W2085863146 hasConceptScore W2085863146C148898269 @default.
- W2085863146 hasConceptScore W2085863146C159985019 @default.
- W2085863146 hasConceptScore W2085863146C185592680 @default.
- W2085863146 hasConceptScore W2085863146C186370098 @default.
- W2085863146 hasConceptScore W2085863146C192562407 @default.
- W2085863146 hasConceptScore W2085863146C204323151 @default.
- W2085863146 hasConceptScore W2085863146C204530211 @default.
- W2085863146 hasConceptScore W2085863146C2779281663 @default.
- W2085863146 hasConceptScore W2085863146C2993759403 @default.
- W2085863146 hasConceptScore W2085863146C39353612 @default.
- W2085863146 hasConceptScore W2085863146C41008148 @default.
- W2085863146 hasConceptScore W2085863146C42360764 @default.
- W2085863146 hasConceptScore W2085863146C49040817 @default.
- W2085863146 hasConceptScore W2085863146C544956773 @default.
- W2085863146 hasConceptScore W2085863146C62520636 @default.
- W2085863146 hasConceptScore W2085863146C95121573 @default.
- W2085863146 hasConceptScore W2085863146C97355855 @default.
- W2085863146 hasConceptScore W2085863146C98045186 @default.
- W2085863146 hasIssue "13" @default.
- W2085863146 hasLocation W20858631461 @default.
- W2085863146 hasOpenAccess W2085863146 @default.
- W2085863146 hasPrimaryLocation W20858631461 @default.
- W2085863146 hasRelatedWork W1617556574 @default.
- W2085863146 hasRelatedWork W1856461572 @default.
- W2085863146 hasRelatedWork W2041627708 @default.
- W2085863146 hasRelatedWork W2048213930 @default.
- W2085863146 hasRelatedWork W2098822966 @default.
- W2085863146 hasRelatedWork W2283401420 @default.
- W2085863146 hasRelatedWork W2895833888 @default.
- W2085863146 hasRelatedWork W3184150917 @default.
- W2085863146 hasRelatedWork W4323320274 @default.
- W2085863146 hasRelatedWork W2189262842 @default.
- W2085863146 hasVolume "22" @default.
- W2085863146 isParatext "false" @default.
- W2085863146 isRetracted "false" @default.
- W2085863146 magId "2085863146" @default.
- W2085863146 workType "article" @default.