Matches in SemOpenAlex for { <https://semopenalex.org/work/W2085939002> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2085939002 endingPage "1338" @default.
- W2085939002 startingPage "1334" @default.
- W2085939002 abstract "A process consisting of the deposition of amorphous silicon at low temperatures and subsequent annealing has been proposed for fabricating a boron‐doped polycrystalline silicon film with a low resistivity. This process realized large grain growth up to 3 to 5 μm, leading to a low resistivity of 1.4 mΩ · cm, which one‐half to about one‐third compared with that of direct deposited boron doped polysilicon. In addition to this, extremely low deposition temperature (∼350°C) using a mixture attained uniform boron concentration across the wafers." @default.
- W2085939002 created "2016-06-24" @default.
- W2085939002 creator A5029168224 @default.
- W2085939002 creator A5035919607 @default.
- W2085939002 creator A5041392808 @default.
- W2085939002 creator A5073958618 @default.
- W2085939002 date "1994-05-01" @default.
- W2085939002 modified "2023-09-23" @default.
- W2085939002 title "The Formation of Boron‐Doped Polycrystalline Si with Extremely Low Resistivities at Low Temperatures" @default.
- W2085939002 doi "https://doi.org/10.1149/1.2054919" @default.
- W2085939002 hasPublicationYear "1994" @default.
- W2085939002 type Work @default.
- W2085939002 sameAs 2085939002 @default.
- W2085939002 citedByCount "11" @default.
- W2085939002 crossrefType "journal-article" @default.
- W2085939002 hasAuthorship W2085939002A5029168224 @default.
- W2085939002 hasAuthorship W2085939002A5035919607 @default.
- W2085939002 hasAuthorship W2085939002A5041392808 @default.
- W2085939002 hasAuthorship W2085939002A5073958618 @default.
- W2085939002 hasConcept C119599485 @default.
- W2085939002 hasConcept C127413603 @default.
- W2085939002 hasConcept C137637335 @default.
- W2085939002 hasConcept C151730666 @default.
- W2085939002 hasConcept C159985019 @default.
- W2085939002 hasConcept C160671074 @default.
- W2085939002 hasConcept C178790620 @default.
- W2085939002 hasConcept C185592680 @default.
- W2085939002 hasConcept C191897082 @default.
- W2085939002 hasConcept C192562407 @default.
- W2085939002 hasConcept C2777855556 @default.
- W2085939002 hasConcept C2779227376 @default.
- W2085939002 hasConcept C2779889077 @default.
- W2085939002 hasConcept C2780565262 @default.
- W2085939002 hasConcept C2816523 @default.
- W2085939002 hasConcept C49040817 @default.
- W2085939002 hasConcept C501308230 @default.
- W2085939002 hasConcept C544956773 @default.
- W2085939002 hasConcept C56052488 @default.
- W2085939002 hasConcept C57410435 @default.
- W2085939002 hasConcept C57863236 @default.
- W2085939002 hasConcept C64297162 @default.
- W2085939002 hasConcept C69990965 @default.
- W2085939002 hasConcept C8010536 @default.
- W2085939002 hasConcept C86803240 @default.
- W2085939002 hasConcept C87359718 @default.
- W2085939002 hasConceptScore W2085939002C119599485 @default.
- W2085939002 hasConceptScore W2085939002C127413603 @default.
- W2085939002 hasConceptScore W2085939002C137637335 @default.
- W2085939002 hasConceptScore W2085939002C151730666 @default.
- W2085939002 hasConceptScore W2085939002C159985019 @default.
- W2085939002 hasConceptScore W2085939002C160671074 @default.
- W2085939002 hasConceptScore W2085939002C178790620 @default.
- W2085939002 hasConceptScore W2085939002C185592680 @default.
- W2085939002 hasConceptScore W2085939002C191897082 @default.
- W2085939002 hasConceptScore W2085939002C192562407 @default.
- W2085939002 hasConceptScore W2085939002C2777855556 @default.
- W2085939002 hasConceptScore W2085939002C2779227376 @default.
- W2085939002 hasConceptScore W2085939002C2779889077 @default.
- W2085939002 hasConceptScore W2085939002C2780565262 @default.
- W2085939002 hasConceptScore W2085939002C2816523 @default.
- W2085939002 hasConceptScore W2085939002C49040817 @default.
- W2085939002 hasConceptScore W2085939002C501308230 @default.
- W2085939002 hasConceptScore W2085939002C544956773 @default.
- W2085939002 hasConceptScore W2085939002C56052488 @default.
- W2085939002 hasConceptScore W2085939002C57410435 @default.
- W2085939002 hasConceptScore W2085939002C57863236 @default.
- W2085939002 hasConceptScore W2085939002C64297162 @default.
- W2085939002 hasConceptScore W2085939002C69990965 @default.
- W2085939002 hasConceptScore W2085939002C8010536 @default.
- W2085939002 hasConceptScore W2085939002C86803240 @default.
- W2085939002 hasConceptScore W2085939002C87359718 @default.
- W2085939002 hasIssue "5" @default.
- W2085939002 hasLocation W20859390021 @default.
- W2085939002 hasOpenAccess W2085939002 @default.
- W2085939002 hasPrimaryLocation W20859390021 @default.
- W2085939002 hasRelatedWork W1142261668 @default.
- W2085939002 hasRelatedWork W1970686540 @default.
- W2085939002 hasRelatedWork W1990947937 @default.
- W2085939002 hasRelatedWork W2019985495 @default.
- W2085939002 hasRelatedWork W2048269824 @default.
- W2085939002 hasRelatedWork W2050856805 @default.
- W2085939002 hasRelatedWork W2063677047 @default.
- W2085939002 hasRelatedWork W2275386326 @default.
- W2085939002 hasRelatedWork W2511021840 @default.
- W2085939002 hasRelatedWork W2086742598 @default.
- W2085939002 hasVolume "141" @default.
- W2085939002 isParatext "false" @default.
- W2085939002 isRetracted "false" @default.
- W2085939002 magId "2085939002" @default.
- W2085939002 workType "article" @default.