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- W2085980143 abstract "We present the ability of a focused ion beam system (FIB) to perform as an effective metrology tool. This feature is a benefit in areas where FIB technology is or can be used, or where pre-measurement cross-sectioning is required, such as the case in thin film head trimming, integrated circuit inspection, and micro-electromechanical device (MEMS) development. The FIB is a proven tool for taking high- resolution images, performing mills and depositions, and cross-sectioning samples. We demonstrate the FIB's ability to perform these tasks in a repeatable manner and take accurate measurements independently of the operator. First, we find a quantitative method for analyzing the image quality in order to remove any operator discrepancy. We show that this task can be achieved by analyzing the FIB's Modulation Transfer Function (MTF). The MTF is a proven method for measuring the quality of light optics, but has never been used as a standard in FIB imaging because sub- 100m pitch resolution targets can not easily be fabricated; however, we demonstrate a new method for obtaining the MTF. By correlating changes in FIB parameters to changes in the MTF, we have a FIB image standard, as well as an image calibration tool that is transparent to the operator. Second, we describe how current FIB software can use an automated 'measure tool' to take accurate measurements independently of the operator. We show that when using both these methods, the FIB is a repeatable metrology tool for a variety of applications." @default.
- W2085980143 created "2016-06-24" @default.
- W2085980143 creator A5011477850 @default.
- W2085980143 creator A5024655048 @default.
- W2085980143 creator A5041755066 @default.
- W2085980143 creator A5041782024 @default.
- W2085980143 creator A5069356188 @default.
- W2085980143 date "1998-09-03" @default.
- W2085980143 modified "2023-09-25" @default.
- W2085980143 title "<title>Developments in focused ion beam metrology</title>" @default.
- W2085980143 doi "https://doi.org/10.1117/12.324349" @default.
- W2085980143 hasPublicationYear "1998" @default.
- W2085980143 type Work @default.
- W2085980143 sameAs 2085980143 @default.
- W2085980143 citedByCount "3" @default.
- W2085980143 crossrefType "proceedings-article" @default.
- W2085980143 hasAuthorship W2085980143A5011477850 @default.
- W2085980143 hasAuthorship W2085980143A5024655048 @default.
- W2085980143 hasAuthorship W2085980143A5041755066 @default.
- W2085980143 hasAuthorship W2085980143A5041782024 @default.
- W2085980143 hasAuthorship W2085980143A5069356188 @default.
- W2085980143 hasConcept C111919701 @default.
- W2085980143 hasConcept C120665830 @default.
- W2085980143 hasConcept C121332964 @default.
- W2085980143 hasConcept C145148216 @default.
- W2085980143 hasConcept C154945302 @default.
- W2085980143 hasConcept C161866238 @default.
- W2085980143 hasConcept C165838908 @default.
- W2085980143 hasConcept C165880335 @default.
- W2085980143 hasConcept C192562407 @default.
- W2085980143 hasConcept C195766429 @default.
- W2085980143 hasConcept C205372480 @default.
- W2085980143 hasConcept C41008148 @default.
- W2085980143 hasConcept C56951928 @default.
- W2085980143 hasConcept C62520636 @default.
- W2085980143 hasConceptScore W2085980143C111919701 @default.
- W2085980143 hasConceptScore W2085980143C120665830 @default.
- W2085980143 hasConceptScore W2085980143C121332964 @default.
- W2085980143 hasConceptScore W2085980143C145148216 @default.
- W2085980143 hasConceptScore W2085980143C154945302 @default.
- W2085980143 hasConceptScore W2085980143C161866238 @default.
- W2085980143 hasConceptScore W2085980143C165838908 @default.
- W2085980143 hasConceptScore W2085980143C165880335 @default.
- W2085980143 hasConceptScore W2085980143C192562407 @default.
- W2085980143 hasConceptScore W2085980143C195766429 @default.
- W2085980143 hasConceptScore W2085980143C205372480 @default.
- W2085980143 hasConceptScore W2085980143C41008148 @default.
- W2085980143 hasConceptScore W2085980143C56951928 @default.
- W2085980143 hasConceptScore W2085980143C62520636 @default.
- W2085980143 hasLocation W20859801431 @default.
- W2085980143 hasOpenAccess W2085980143 @default.
- W2085980143 hasPrimaryLocation W20859801431 @default.
- W2085980143 hasRelatedWork W1964568879 @default.
- W2085980143 hasRelatedWork W1999984697 @default.
- W2085980143 hasRelatedWork W2001966778 @default.
- W2085980143 hasRelatedWork W2013007037 @default.
- W2085980143 hasRelatedWork W2085980143 @default.
- W2085980143 hasRelatedWork W2096837522 @default.
- W2085980143 hasRelatedWork W2389089068 @default.
- W2085980143 hasRelatedWork W2732108944 @default.
- W2085980143 hasRelatedWork W2896992569 @default.
- W2085980143 hasRelatedWork W3011787082 @default.
- W2085980143 isParatext "false" @default.
- W2085980143 isRetracted "false" @default.
- W2085980143 magId "2085980143" @default.
- W2085980143 workType "article" @default.