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- W2085994039 abstract "We have examined the reactions of fluorinated layers on Si(100) induced by hyperthermal Xe atoms. Thick fluorinated layers were prepared by the exposure of XeF 2 on silicon surfaces at 480 K. The incident kinetic energies of the Xe atoms varied up to about 5 eV. When the Xe atom beams were impinged on the fluorinated surfaces with an energy exceeding 2 eV, desorption of fluoride (SiF 3 or SiF 4 ) from the fluorinated layers was observed. After the Xe irradiation the SiF 3 + peak disappeared in the temperature-programmed desorption spectra. A collision-induced reaction of the fluorinated layer by hyperthermal Xe atoms is clearly demonstrated." @default.
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- W2085994039 date "1996-06-01" @default.
- W2085994039 modified "2023-09-27" @default.
- W2085994039 title "Collision-induced reaction of a fluorinated Si(100) by hyperthermal Xe atoms" @default.
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- W2085994039 doi "https://doi.org/10.1016/0039-6028(96)00268-3" @default.
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