Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086076095> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2086076095 endingPage "99" @default.
- W2086076095 startingPage "93" @default.
- W2086076095 abstract "In this paper, we present a measurement technique for the characterization and the self-test of Single Crystal Reactive Etching and Metallization (SCREAM)-fabricated tunable resonators. Such kinds of structures can be used for frequency selective vibration detection. Spectral information is extracted directly by mechanical filtering at the resonance frequency of the sensor structures. Flexible adjustment of the measurement range is obtained by means of resonance frequency tuning. The structures described in this paper use electrostatic softening (negative springs) to vary the total spring constant of the system. Frequency selective measurements require the exact knowledge of resonance frequency and quality factor. Therefore, a measurement technique for the characterization of the resonance behavior based on electrostatic actuation and capacitive detection of the second harmonic was developed. Undesired coupling effects are eliminated by anti-phase drive signals. Using this method, sensor arrays of tunable resonators are efficiently characterized." @default.
- W2086076095 created "2016-06-24" @default.
- W2086076095 creator A5025136246 @default.
- W2086076095 creator A5037047630 @default.
- W2086076095 creator A5044192461 @default.
- W2086076095 creator A5060204434 @default.
- W2086076095 creator A5060645483 @default.
- W2086076095 creator A5070885421 @default.
- W2086076095 date "2004-03-01" @default.
- W2086076095 modified "2023-10-02" @default.
- W2086076095 title "Characterization and self-test of electrostatically tunable resonators for frequency selective vibration measurements" @default.
- W2086076095 cites W1972668047 @default.
- W2086076095 cites W1978499032 @default.
- W2086076095 cites W2004439085 @default.
- W2086076095 cites W2036103468 @default.
- W2086076095 cites W2056390289 @default.
- W2086076095 cites W2094809346 @default.
- W2086076095 cites W2099661044 @default.
- W2086076095 cites W2112535567 @default.
- W2086076095 cites W2125824105 @default.
- W2086076095 cites W2618157987 @default.
- W2086076095 doi "https://doi.org/10.1016/j.sna.2003.10.010" @default.
- W2086076095 hasPublicationYear "2004" @default.
- W2086076095 type Work @default.
- W2086076095 sameAs 2086076095 @default.
- W2086076095 citedByCount "29" @default.
- W2086076095 countsByYear W20860760952012 @default.
- W2086076095 countsByYear W20860760952013 @default.
- W2086076095 countsByYear W20860760952014 @default.
- W2086076095 countsByYear W20860760952015 @default.
- W2086076095 countsByYear W20860760952017 @default.
- W2086076095 countsByYear W20860760952018 @default.
- W2086076095 countsByYear W20860760952019 @default.
- W2086076095 crossrefType "journal-article" @default.
- W2086076095 hasAuthorship W2086076095A5025136246 @default.
- W2086076095 hasAuthorship W2086076095A5037047630 @default.
- W2086076095 hasAuthorship W2086076095A5044192461 @default.
- W2086076095 hasAuthorship W2086076095A5060204434 @default.
- W2086076095 hasAuthorship W2086076095A5060645483 @default.
- W2086076095 hasAuthorship W2086076095A5070885421 @default.
- W2086076095 hasConcept C109214941 @default.
- W2086076095 hasConcept C119599485 @default.
- W2086076095 hasConcept C121332964 @default.
- W2086076095 hasConcept C127413603 @default.
- W2086076095 hasConcept C127934551 @default.
- W2086076095 hasConcept C139210041 @default.
- W2086076095 hasConcept C171250308 @default.
- W2086076095 hasConcept C187725362 @default.
- W2086076095 hasConcept C192562407 @default.
- W2086076095 hasConcept C196348190 @default.
- W2086076095 hasConcept C198394728 @default.
- W2086076095 hasConcept C206755178 @default.
- W2086076095 hasConcept C24890656 @default.
- W2086076095 hasConcept C2780841128 @default.
- W2086076095 hasConcept C49040817 @default.
- W2086076095 hasConcept C97126364 @default.
- W2086076095 hasConceptScore W2086076095C109214941 @default.
- W2086076095 hasConceptScore W2086076095C119599485 @default.
- W2086076095 hasConceptScore W2086076095C121332964 @default.
- W2086076095 hasConceptScore W2086076095C127413603 @default.
- W2086076095 hasConceptScore W2086076095C127934551 @default.
- W2086076095 hasConceptScore W2086076095C139210041 @default.
- W2086076095 hasConceptScore W2086076095C171250308 @default.
- W2086076095 hasConceptScore W2086076095C187725362 @default.
- W2086076095 hasConceptScore W2086076095C192562407 @default.
- W2086076095 hasConceptScore W2086076095C196348190 @default.
- W2086076095 hasConceptScore W2086076095C198394728 @default.
- W2086076095 hasConceptScore W2086076095C206755178 @default.
- W2086076095 hasConceptScore W2086076095C24890656 @default.
- W2086076095 hasConceptScore W2086076095C2780841128 @default.
- W2086076095 hasConceptScore W2086076095C49040817 @default.
- W2086076095 hasConceptScore W2086076095C97126364 @default.
- W2086076095 hasIssue "1" @default.
- W2086076095 hasLocation W20860760951 @default.
- W2086076095 hasOpenAccess W2086076095 @default.
- W2086076095 hasPrimaryLocation W20860760951 @default.
- W2086076095 hasRelatedWork W1992994658 @default.
- W2086076095 hasRelatedWork W2030471483 @default.
- W2086076095 hasRelatedWork W2035096560 @default.
- W2086076095 hasRelatedWork W2045654306 @default.
- W2086076095 hasRelatedWork W2140275076 @default.
- W2086076095 hasRelatedWork W2503399923 @default.
- W2086076095 hasRelatedWork W2613469547 @default.
- W2086076095 hasRelatedWork W2784206145 @default.
- W2086076095 hasRelatedWork W2891340387 @default.
- W2086076095 hasRelatedWork W3007345743 @default.
- W2086076095 hasVolume "111" @default.
- W2086076095 isParatext "false" @default.
- W2086076095 isRetracted "false" @default.
- W2086076095 magId "2086076095" @default.
- W2086076095 workType "article" @default.