Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086244807> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2086244807 endingPage "L171" @default.
- W2086244807 startingPage "L169" @default.
- W2086244807 abstract "and have similar lattice constants to GaN, and may prove useful as substrates for III‐nitride epitaxy. We have found that these materials may be wet chemically etched in some acid solutions, including HF, at rates between 150 and 40,000 Å/min. Dry etching with plasmas provides faster rates than or under electron cyclotron resonance conditions, indicating the fluoride etch products are more volatile that their chloride or metallorganic/hydride counterparts." @default.
- W2086244807 created "2016-06-24" @default.
- W2086244807 creator A5017875762 @default.
- W2086244807 creator A5067667351 @default.
- W2086244807 creator A5077738125 @default.
- W2086244807 creator A5088018334 @default.
- W2086244807 creator A5091790620 @default.
- W2086244807 date "1996-08-01" @default.
- W2086244807 modified "2023-09-27" @default.
- W2086244807 title "Wet and Dry Etching of LiGaO2 and LiAlO2" @default.
- W2086244807 doi "https://doi.org/10.1149/1.1837018" @default.
- W2086244807 hasPublicationYear "1996" @default.
- W2086244807 type Work @default.
- W2086244807 sameAs 2086244807 @default.
- W2086244807 citedByCount "8" @default.
- W2086244807 crossrefType "journal-article" @default.
- W2086244807 hasAuthorship W2086244807A5017875762 @default.
- W2086244807 hasAuthorship W2086244807A5067667351 @default.
- W2086244807 hasAuthorship W2086244807A5077738125 @default.
- W2086244807 hasAuthorship W2086244807A5088018334 @default.
- W2086244807 hasAuthorship W2086244807A5091790620 @default.
- W2086244807 hasConcept C100460472 @default.
- W2086244807 hasConcept C107872376 @default.
- W2086244807 hasConcept C110738630 @default.
- W2086244807 hasConcept C113196181 @default.
- W2086244807 hasConcept C120665830 @default.
- W2086244807 hasConcept C121332964 @default.
- W2086244807 hasConcept C1291036 @default.
- W2086244807 hasConcept C130472188 @default.
- W2086244807 hasConcept C132612359 @default.
- W2086244807 hasConcept C145148216 @default.
- W2086244807 hasConcept C175361016 @default.
- W2086244807 hasConcept C178790620 @default.
- W2086244807 hasConcept C179104552 @default.
- W2086244807 hasConcept C185592680 @default.
- W2086244807 hasConcept C192562407 @default.
- W2086244807 hasConcept C194760766 @default.
- W2086244807 hasConcept C207114421 @default.
- W2086244807 hasConcept C24890656 @default.
- W2086244807 hasConcept C2777961443 @default.
- W2086244807 hasConcept C2778695967 @default.
- W2086244807 hasConcept C2779227376 @default.
- W2086244807 hasConcept C2780828025 @default.
- W2086244807 hasConcept C2781204021 @default.
- W2086244807 hasConcept C544153396 @default.
- W2086244807 hasConcept C62520636 @default.
- W2086244807 hasConcept C81626474 @default.
- W2086244807 hasConcept C82706917 @default.
- W2086244807 hasConceptScore W2086244807C100460472 @default.
- W2086244807 hasConceptScore W2086244807C107872376 @default.
- W2086244807 hasConceptScore W2086244807C110738630 @default.
- W2086244807 hasConceptScore W2086244807C113196181 @default.
- W2086244807 hasConceptScore W2086244807C120665830 @default.
- W2086244807 hasConceptScore W2086244807C121332964 @default.
- W2086244807 hasConceptScore W2086244807C1291036 @default.
- W2086244807 hasConceptScore W2086244807C130472188 @default.
- W2086244807 hasConceptScore W2086244807C132612359 @default.
- W2086244807 hasConceptScore W2086244807C145148216 @default.
- W2086244807 hasConceptScore W2086244807C175361016 @default.
- W2086244807 hasConceptScore W2086244807C178790620 @default.
- W2086244807 hasConceptScore W2086244807C179104552 @default.
- W2086244807 hasConceptScore W2086244807C185592680 @default.
- W2086244807 hasConceptScore W2086244807C192562407 @default.
- W2086244807 hasConceptScore W2086244807C194760766 @default.
- W2086244807 hasConceptScore W2086244807C207114421 @default.
- W2086244807 hasConceptScore W2086244807C24890656 @default.
- W2086244807 hasConceptScore W2086244807C2777961443 @default.
- W2086244807 hasConceptScore W2086244807C2778695967 @default.
- W2086244807 hasConceptScore W2086244807C2779227376 @default.
- W2086244807 hasConceptScore W2086244807C2780828025 @default.
- W2086244807 hasConceptScore W2086244807C2781204021 @default.
- W2086244807 hasConceptScore W2086244807C544153396 @default.
- W2086244807 hasConceptScore W2086244807C62520636 @default.
- W2086244807 hasConceptScore W2086244807C81626474 @default.
- W2086244807 hasConceptScore W2086244807C82706917 @default.
- W2086244807 hasIssue "8" @default.
- W2086244807 hasLocation W20862448071 @default.
- W2086244807 hasOpenAccess W2086244807 @default.
- W2086244807 hasPrimaryLocation W20862448071 @default.
- W2086244807 hasRelatedWork W118848176 @default.
- W2086244807 hasRelatedWork W19452786 @default.
- W2086244807 hasRelatedWork W1972548265 @default.
- W2086244807 hasRelatedWork W1980089317 @default.
- W2086244807 hasRelatedWork W2034184378 @default.
- W2086244807 hasRelatedWork W2034252264 @default.
- W2086244807 hasRelatedWork W2045553774 @default.
- W2086244807 hasRelatedWork W2121830057 @default.
- W2086244807 hasRelatedWork W2129418082 @default.
- W2086244807 hasRelatedWork W2238517559 @default.
- W2086244807 hasVolume "143" @default.
- W2086244807 isParatext "false" @default.
- W2086244807 isRetracted "false" @default.
- W2086244807 magId "2086244807" @default.
- W2086244807 workType "article" @default.