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- W2086364336 abstract "Condensation behavior of polymer aggregate in side-wall of resist pattern is characterized by using atomic force microscope (AFM). Various hardening process, thermal heating and EB irradiation, are performed on the resist pattern after the pattern development. The condensation of polymer aggregates in the side-wall is clearly imaged. By the hardening treatments, condensation of polymer aggregate is accelerated. The interaction force among polymer aggregates can be analyzed based on Derjaguin approximation. The condensation structure of polymer aggregate accompanying with aggregate vacancy is also discussed." @default.
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- W2086364336 date "2004-01-01" @default.
- W2086364336 modified "2023-09-24" @default.
- W2086364336 title "Cohesion Property of Polymer Aggregate Depending on Hardening Treatment" @default.
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- W2086364336 doi "https://doi.org/10.2494/photopolymer.17.99" @default.
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