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- W2086418532 abstract "Results of investigations of the optical properties of amorphous and microcrystalline Si:H, Cl films obtained from an SiCl4-H2-Ar glow discharge are reported. It was found that both the crystallinity and the impurity content (hydrogen and chlorine), which are important in determining the optical properties, are strongly influenced by the addition of argon. In particular, a marked effect of the crystalline grain size on the degree of disorder is found." @default.
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- W2086418532 date "1985-07-01" @default.
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- W2086418532 title "Effect of argon addition to SiCl4-H2 mixtures on the optical properties of glow discharge silicon films" @default.
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- W2086418532 doi "https://doi.org/10.1016/0040-6090(85)90048-3" @default.
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