Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086503886> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2086503886 endingPage "873" @default.
- W2086503886 startingPage "871" @default.
- W2086503886 abstract "1 8O was introduced into float-zone Si wafers during oxidation in H2 18O at temperatures from 600–1240 °C, and the 18O concentration profiles were measured by secondary ion mass spectrometry. The oxygen solubility, as determined from the surface 18O concentrations, was found to be significantly higher in as-oxidized wafers than in post-oxidation annealed wafers. The temperature dependence of the as-oxidized solubility, Sox, can be described by Sox(T)=1.2×1020 cm−3 exp(−0.67 eV/kT), with a higher activation energy of 1.02 eV for the equilibrium solubility. These results are compared with other published oxygen solubility determinations." @default.
- W2086503886 created "2016-06-24" @default.
- W2086503886 creator A5010433466 @default.
- W2086503886 date "1982-11-01" @default.
- W2086503886 modified "2023-10-03" @default.
- W2086503886 title "Excess solubility of oxygen in silicon during steam oxidation" @default.
- W2086503886 cites W1983595367 @default.
- W2086503886 cites W1988861996 @default.
- W2086503886 cites W2012339481 @default.
- W2086503886 cites W2026476149 @default.
- W2086503886 cites W2057874378 @default.
- W2086503886 cites W2059081369 @default.
- W2086503886 cites W2073057171 @default.
- W2086503886 cites W2077901798 @default.
- W2086503886 cites W2172197770 @default.
- W2086503886 doi "https://doi.org/10.1063/1.93681" @default.
- W2086503886 hasPublicationYear "1982" @default.
- W2086503886 type Work @default.
- W2086503886 sameAs 2086503886 @default.
- W2086503886 citedByCount "50" @default.
- W2086503886 countsByYear W20865038862014 @default.
- W2086503886 countsByYear W20865038862015 @default.
- W2086503886 countsByYear W20865038862022 @default.
- W2086503886 crossrefType "journal-article" @default.
- W2086503886 hasAuthorship W2086503886A5010433466 @default.
- W2086503886 hasConcept C113196181 @default.
- W2086503886 hasConcept C147789679 @default.
- W2086503886 hasConcept C155574463 @default.
- W2086503886 hasConcept C160671074 @default.
- W2086503886 hasConcept C162356407 @default.
- W2086503886 hasConcept C171250308 @default.
- W2086503886 hasConcept C178790620 @default.
- W2086503886 hasConcept C179104552 @default.
- W2086503886 hasConcept C185592680 @default.
- W2086503886 hasConcept C191897082 @default.
- W2086503886 hasConcept C192562407 @default.
- W2086503886 hasConcept C2777855556 @default.
- W2086503886 hasConcept C43617362 @default.
- W2086503886 hasConcept C540031477 @default.
- W2086503886 hasConcept C544956773 @default.
- W2086503886 hasConcept C77671233 @default.
- W2086503886 hasConceptScore W2086503886C113196181 @default.
- W2086503886 hasConceptScore W2086503886C147789679 @default.
- W2086503886 hasConceptScore W2086503886C155574463 @default.
- W2086503886 hasConceptScore W2086503886C160671074 @default.
- W2086503886 hasConceptScore W2086503886C162356407 @default.
- W2086503886 hasConceptScore W2086503886C171250308 @default.
- W2086503886 hasConceptScore W2086503886C178790620 @default.
- W2086503886 hasConceptScore W2086503886C179104552 @default.
- W2086503886 hasConceptScore W2086503886C185592680 @default.
- W2086503886 hasConceptScore W2086503886C191897082 @default.
- W2086503886 hasConceptScore W2086503886C192562407 @default.
- W2086503886 hasConceptScore W2086503886C2777855556 @default.
- W2086503886 hasConceptScore W2086503886C43617362 @default.
- W2086503886 hasConceptScore W2086503886C540031477 @default.
- W2086503886 hasConceptScore W2086503886C544956773 @default.
- W2086503886 hasConceptScore W2086503886C77671233 @default.
- W2086503886 hasIssue "9" @default.
- W2086503886 hasLocation W20865038861 @default.
- W2086503886 hasOpenAccess W2086503886 @default.
- W2086503886 hasPrimaryLocation W20865038861 @default.
- W2086503886 hasRelatedWork W1585227540 @default.
- W2086503886 hasRelatedWork W1986635999 @default.
- W2086503886 hasRelatedWork W2020433102 @default.
- W2086503886 hasRelatedWork W2025033863 @default.
- W2086503886 hasRelatedWork W2042925312 @default.
- W2086503886 hasRelatedWork W2050041811 @default.
- W2086503886 hasRelatedWork W2072581800 @default.
- W2086503886 hasRelatedWork W2127348822 @default.
- W2086503886 hasRelatedWork W2558050758 @default.
- W2086503886 hasRelatedWork W2483642862 @default.
- W2086503886 hasVolume "41" @default.
- W2086503886 isParatext "false" @default.
- W2086503886 isRetracted "false" @default.
- W2086503886 magId "2086503886" @default.
- W2086503886 workType "article" @default.