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• W2086525392 endingPage "192" @default.
• W2086525392 startingPage "189" @default.
• W2086525392 abstract "The etching characteristics of evaporation-deposited indium tin oxide (ITO) films in BCl3/Cl2 inductively coupled plasmas have been studied. High etch rates &gt;200 nm/min were obtained at large BCl3/Cl2 gas flow ratios and high rf chuck powers, suggesting that the etching process is limited by sputter desorption of InClx and SnClx compounds. The addition of a small amount of CF4, which acts as reducing agent, increased the etch rate by 30% and resulted in very smooth etched surfaces. It has also been found that the material crystallinity has a pronounced influence on ITO etch rate. ITO films annealed at 500 °C exhibited the maximum etch resistance." @default.
• W2086525392 created "2016-06-24" @default.
• W2086525392 creator A5009932944 @default.
• W2086525392 creator A5084321583 @default.
• W2086525392 date "2010-01-19" @default.
• W2086525392 modified "2023-09-27" @default.
• W2086525392 title "Fast and smooth etching of indium tin oxides in BCl3/Cl2 inductively coupled plasmas" @default.
• W2086525392 cites W1966788696 @default.
• W2086525392 cites W1987052775 @default.
• W2086525392 cites W1991916064 @default.
• W2086525392 cites W1996453640 @default.
• W2086525392 cites W2020899701 @default.
• W2086525392 cites W2022951270 @default.
• W2086525392 cites W2033133763 @default.
• W2086525392 cites W2038707202 @default.
• W2086525392 cites W2042491212 @default.
• W2086525392 cites W2048116931 @default.
• W2086525392 cites W2064452617 @default.
• W2086525392 cites W2073666091 @default.
• W2086525392 cites W2078562056 @default.
• W2086525392 cites W2081383845 @default.
• W2086525392 cites W2145441386 @default.
• W2086525392 cites W2147279935 @default.
• W2086525392 cites W2396863796 @default.
• W2086525392 doi "https://doi.org/10.1116/1.3280919" @default.
• W2086525392 hasPublicationYear "2010" @default.
• W2086525392 type Work @default.
• W2086525392 sameAs 2086525392 @default.
• W2086525392 citedByCount "8" @default.
• W2086525392 countsByYear W20865253922012 @default.
• W2086525392 countsByYear W20865253922016 @default.
• W2086525392 countsByYear W20865253922017 @default.
• W2086525392 countsByYear W20865253922018 @default.
• W2086525392 countsByYear W20865253922020 @default.
• W2086525392 countsByYear W20865253922022 @default.
• W2086525392 crossrefType "journal-article" @default.
• W2086525392 hasAuthorship W2086525392A5009932944 @default.
• W2086525392 hasAuthorship W2086525392A5084321583 @default.
• W2086525392 hasConcept C100460472 @default.
• W2086525392 hasConcept C107187091 @default.
• W2086525392 hasConcept C113196181 @default.
• W2086525392 hasConcept C121332964 @default.
• W2086525392 hasConcept C150394285 @default.
• W2086525392 hasConcept C159985019 @default.
• W2086525392 hasConcept C162711632 @default.
• W2086525392 hasConcept C171250308 @default.
• W2086525392 hasConcept C178790620 @default.
• W2086525392 hasConcept C185592680 @default.
• W2086525392 hasConcept C19067145 @default.
• W2086525392 hasConcept C191897082 @default.
• W2086525392 hasConcept C192562407 @default.
• W2086525392 hasConcept C22423302 @default.
• W2086525392 hasConcept C2779227376 @default.
• W2086525392 hasConcept C2779851234 @default.
• W2086525392 hasConcept C32737372 @default.
• W2086525392 hasConcept C43617362 @default.
• W2086525392 hasConcept C46275449 @default.
• W2086525392 hasConcept C525849907 @default.
• W2086525392 hasConcept C543292547 @default.
• W2086525392 hasConcept C61441594 @default.
• W2086525392 hasConcept C62520636 @default.
• W2086525392 hasConcept C81626474 @default.
• W2086525392 hasConcept C82706917 @default.
• W2086525392 hasConcept C95974651 @default.
• W2086525392 hasConcept C97355855 @default.
• W2086525392 hasConceptScore W2086525392C100460472 @default.
• W2086525392 hasConceptScore W2086525392C107187091 @default.
• W2086525392 hasConceptScore W2086525392C113196181 @default.
• W2086525392 hasConceptScore W2086525392C121332964 @default.
• W2086525392 hasConceptScore W2086525392C150394285 @default.
• W2086525392 hasConceptScore W2086525392C159985019 @default.
• W2086525392 hasConceptScore W2086525392C162711632 @default.
• W2086525392 hasConceptScore W2086525392C171250308 @default.
• W2086525392 hasConceptScore W2086525392C178790620 @default.
• W2086525392 hasConceptScore W2086525392C185592680 @default.
• W2086525392 hasConceptScore W2086525392C19067145 @default.
• W2086525392 hasConceptScore W2086525392C191897082 @default.
• W2086525392 hasConceptScore W2086525392C192562407 @default.
• W2086525392 hasConceptScore W2086525392C22423302 @default.
• W2086525392 hasConceptScore W2086525392C2779227376 @default.
• W2086525392 hasConceptScore W2086525392C2779851234 @default.
• W2086525392 hasConceptScore W2086525392C32737372 @default.
• W2086525392 hasConceptScore W2086525392C43617362 @default.
• W2086525392 hasConceptScore W2086525392C46275449 @default.
• W2086525392 hasConceptScore W2086525392C525849907 @default.
• W2086525392 hasConceptScore W2086525392C543292547 @default.
• W2086525392 hasConceptScore W2086525392C61441594 @default.
• W2086525392 hasConceptScore W2086525392C62520636 @default.
• W2086525392 hasConceptScore W2086525392C81626474 @default.
• W2086525392 hasConceptScore W2086525392C82706917 @default.
• W2086525392 hasConceptScore W2086525392C95974651 @default.
• W2086525392 hasConceptScore W2086525392C97355855 @default.
• W2086525392 hasIssue "2" @default.
• W2086525392 hasLocation W20865253921 @default.
• W2086525392 hasOpenAccess W2086525392 @default.
• W2086525392 hasPrimaryLocation W20865253921 @default.
• W2086525392 hasRelatedWork W1963646017 @default.
• W2086525392 hasRelatedWork W1964230731 @default.

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