Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086591218> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2086591218 endingPage "749" @default.
- W2086591218 startingPage "744" @default.
- W2086591218 abstract "Abstract Rapid thermal nitridation (RTN) of silicon dioxide films and silicon covered with its native oxide was performed at atmospheric pressure in a lamp heated furnace in NH3 at a temperature of 1000 ° C. Physicochemical characterizations of grown films were carried out by nuclear reaction analysis (NRA) and X-ray photoelectron spectroscopy (XPS). For the films formed by the nitridation of silicon with its native oxide, the XPS measurements, using normal and grazing emergence angles, indicate that a stoichiometric silicon nitride appears between two nitroxide (SiOxNy) films at the silicon/dielectric interface and at the surface of the dielectric. The depth profile of nitrogen in films formed by the rapid thermal nitridation of a 36 A silicon dioxide was determined using chemical etching associated with NRA and estimated through the XPS technique. A homogeneous nitroxide was evidenced for the most part of the dielectric film, and a monolayer (∼ 0.7 × 1015 atoms cm−2) of stoichiometric silicon nitride was observed at the interface between the silicon substrate and the nitroxide film." @default.
- W2086591218 created "2016-06-24" @default.
- W2086591218 creator A5023982521 @default.
- W2086591218 creator A5049893362 @default.
- W2086591218 creator A5052313618 @default.
- W2086591218 creator A5054148972 @default.
- W2086591218 creator A5090681673 @default.
- W2086591218 creator A5028961041 @default.
- W2086591218 date "1992-02-01" @default.
- W2086591218 modified "2023-10-14" @default.
- W2086591218 title "NRA and XPS characterizations of layers formed by rapid thermal nitridation of thin SiO2 films" @default.
- W2086591218 cites W1969987649 @default.
- W2086591218 cites W1978231786 @default.
- W2086591218 cites W1987351860 @default.
- W2086591218 cites W1987707549 @default.
- W2086591218 cites W1994210578 @default.
- W2086591218 cites W2029146233 @default.
- W2086591218 cites W2038125403 @default.
- W2086591218 cites W2041969494 @default.
- W2086591218 cites W2043297789 @default.
- W2086591218 cites W2051129356 @default.
- W2086591218 cites W2066346259 @default.
- W2086591218 cites W2160532088 @default.
- W2086591218 cites W2331987763 @default.
- W2086591218 doi "https://doi.org/10.1016/0168-583x(92)95570-h" @default.
- W2086591218 hasPublicationYear "1992" @default.
- W2086591218 type Work @default.
- W2086591218 sameAs 2086591218 @default.
- W2086591218 citedByCount "6" @default.
- W2086591218 countsByYear W20865912182014 @default.
- W2086591218 crossrefType "journal-article" @default.
- W2086591218 hasAuthorship W2086591218A5023982521 @default.
- W2086591218 hasAuthorship W2086591218A5028961041 @default.
- W2086591218 hasAuthorship W2086591218A5049893362 @default.
- W2086591218 hasAuthorship W2086591218A5052313618 @default.
- W2086591218 hasAuthorship W2086591218A5054148972 @default.
- W2086591218 hasAuthorship W2086591218A5090681673 @default.
- W2086591218 hasConcept C121332964 @default.
- W2086591218 hasConcept C127413603 @default.
- W2086591218 hasConcept C171250308 @default.
- W2086591218 hasConcept C175708663 @default.
- W2086591218 hasConcept C19067145 @default.
- W2086591218 hasConcept C192562407 @default.
- W2086591218 hasConcept C204530211 @default.
- W2086591218 hasConcept C42360764 @default.
- W2086591218 hasConcept C97355855 @default.
- W2086591218 hasConceptScore W2086591218C121332964 @default.
- W2086591218 hasConceptScore W2086591218C127413603 @default.
- W2086591218 hasConceptScore W2086591218C171250308 @default.
- W2086591218 hasConceptScore W2086591218C175708663 @default.
- W2086591218 hasConceptScore W2086591218C19067145 @default.
- W2086591218 hasConceptScore W2086591218C192562407 @default.
- W2086591218 hasConceptScore W2086591218C204530211 @default.
- W2086591218 hasConceptScore W2086591218C42360764 @default.
- W2086591218 hasConceptScore W2086591218C97355855 @default.
- W2086591218 hasIssue "1-4" @default.
- W2086591218 hasLocation W20865912181 @default.
- W2086591218 hasOpenAccess W2086591218 @default.
- W2086591218 hasPrimaryLocation W20865912181 @default.
- W2086591218 hasRelatedWork W2020567181 @default.
- W2086591218 hasRelatedWork W2070716949 @default.
- W2086591218 hasRelatedWork W2089998105 @default.
- W2086591218 hasRelatedWork W2095553506 @default.
- W2086591218 hasRelatedWork W2137698558 @default.
- W2086591218 hasRelatedWork W2169186142 @default.
- W2086591218 hasRelatedWork W2361156483 @default.
- W2086591218 hasRelatedWork W2790297317 @default.
- W2086591218 hasRelatedWork W2958829703 @default.
- W2086591218 hasRelatedWork W3025948708 @default.
- W2086591218 hasVolume "64" @default.
- W2086591218 isParatext "false" @default.
- W2086591218 isRetracted "false" @default.
- W2086591218 magId "2086591218" @default.
- W2086591218 workType "article" @default.